A Dedicated Gas Analysis System Based on Resonant MEMS Sensors for Detection of Illicit Substances in Cargo Containers † - Institut d'électronique, systèmes de communication et microsystèmes Accéder directement au contenu
Article Dans Une Revue Proceedings Année : 2017

A Dedicated Gas Analysis System Based on Resonant MEMS Sensors for Detection of Illicit Substances in Cargo Containers †

Résumé

In this work, a dedicated gas analysis system has been designed to interface resonant micro-cantilever sensors for the detection of illicit substances for the inspection of container and large-volumes freight. In a previous work, we have fabricated diamond micro-cantilever sensors which have been coated with a sensitive layer. A gas analysis cell was developed to hold 8 sensors and allow them to be easily changed. A dedicated electronic read-out circuit provides low-noise detection of all sensors output signal. To complement this existing technology, we are designing a new system to accurately tune temperature and flow parameters of the analyzed gas. In parallel, micro-cantilever sensors have been optimized to increase sensor and gauge sensitivities.
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hal-02440246 , version 1 (15-01-2020)

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Maira Possas, Lionel Rousseau, Farbod Ghassemi, Pedro González Losada, Julien Pagazani, et al.. A Dedicated Gas Analysis System Based on Resonant MEMS Sensors for Detection of Illicit Substances in Cargo Containers †. Proceedings, 2017, 1, ⟨10.3390/proceedings1040601⟩. ⟨hal-02440246⟩
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