Article Dans Une Revue Thin Solid Films Année : 2025

Phase controlled epitaxy of wurtzite ZnS thin films by metal organic chemical vapor deposition

Résumé

In many semiconductors, metastable polytype phases are attractive to tune physical properties. Owing to a noncentrosymmetric structure, ZnS with a wurtzite (WZ) phase would exhibit additional piezoelectric properties, optical non-linearity as well as Rashba effect. Because bulk single crystalline ZnS-WZ is not commercially available in useful sizes and attractive prices, large area thin films with controlled crystalline phase are required. We report the synthesis of ZnS films deposited on m-plane CdS substrates as a proof of concept of the replication of the WZ stacking on non-polar surfaces. First, a chemical mechanical polishing is required for the substrate preparation. ZnS layers are subsequently grown using metal organic chemical vapor deposition. The results show a strong impact of the growth temperature on the CdS substrate surface that is highly detrimental on the crystalline quality of the layer. However, the m-plane ZnS layers grown at 360 • C have WZ structure with a perfect epitaxial orientation relationship with the CdS-WZ substrate. The hexagonality in ZnS-WZ is about 90 %. Strain relaxation occurs through the formation of misfit dislocations at the interface forming basal and prismatic stacking faults on {11-20} planes. Additional pyramidal planar defects are evidenced. With the optimisation of a buffer layer or a more suitable substrate, this ZnS-WZ layers may find various applications not limited to optics such as piezoelectricity or spintronics. Additionally, they may be used as a platform for the growth of other materials with the envisioned WZ structure.
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hal-04923778 , version 1 (31-01-2025)

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Hassan Melhem, Geraldine Hallais, Gaelle Amiri, Gilles Patriarche, Nathaniel Findling, et al.. Phase controlled epitaxy of wurtzite ZnS thin films by metal organic chemical vapor deposition. Thin Solid Films, 2025, 812, pp.140609. ⟨10.1016/j.tsf.2025.140609⟩. ⟨hal-04923778⟩
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