Infrared photoinduced force near-field spectroscopy of silicon carbide - Groupe de Recherche en Electronique, Matériaux, Acoustique et Nanotechnologies
Article Dans Une Revue Applied Surface Science Année : 2024

Infrared photoinduced force near-field spectroscopy of silicon carbide

Résumé

Silicon carbide (SiC) is a promising microelectronic semiconductor with an infrared response that depends on factors such as polytype, growth conditions, or structuring. Recent advances in infrared nano-imaging techniques provide new opportunities to characterize thin films at the nanoscale. We performed tip-enhanced near-field spectral characterization on various 4H-SiC sample surfaces using photoinduced force microscopy (PiFM). The near-field spectra feature a peak associated with a surface phonon polariton (SPhP) resonance, which proves to be highly sensitive to the material's surface quality. Interestingly, we found that the power absorption at the tip-sample junction, enhanced by the effective tip polarizability, can account for these PiFM spectra, resulting in a blend of both dispersive and dissipative spectral line shapes. As a potential application, a junction-field effect transistor is imaged to evaluate the technique's ability to map the surface of different p-and n-doped areas, demonstrating high sensitivity and spatial resolution compared to Raman analysis.
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Dates et versions

hal-04796916 , version 1 (21-11-2024)

Identifiants

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Kuan-Ting Wu, Youssef El-Helou, Elise Usureau, Enora Vuillermet, Michel Kazan, et al.. Infrared photoinduced force near-field spectroscopy of silicon carbide. Applied Surface Science, 2024, pp.161798. ⟨10.1016/j.apsusc.2024.161798⟩. ⟨hal-04796916⟩
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