Towards Autonomous Smart Sensors Systems on CMOS technologies for real time environmental quality monitoring
Résumé
Smart Sensors are crucial technological building blocks for a wide range of applications including information technologies, automotive, industrial systems, health monitoring and environmental quality monitoring. In the context of Internet of Things (IoT), ultra-low-power sensors integrated on CMOS is an interesting option for Wireless Sensor Nodes (WSN) for real-time environmental quality monitoring. Indeed, the combination of ultra-low power and ultra-sensitive and technologies combined with communications technologies offers a real advantage for autonomous System on Chip (SoC) sensing solutions. This approach opens the way to the integration of extremely small sensors with a possibility of multiple sensing by matrix approach for electronic noses.
In this talk, we present the interest of Fully Depleted Silicon On Insulator (FDSOI) technologies for sensing applications. After a description of pH sensors (ISFETs) integrated on industrial 28 nm FDSOI CMOS platform using ALD deposited aluminum oxide as sensing layers, we present recent advances on sensing materials for environmental sensors for air and water quality monitoring. For air quality monitoring, we will present sensing properties at very low temperatures (50 °C) of metal oxides (SnO2) and hybrid polymers (PEI + SiO2 NPs) for NO2 and CO2 detection respectively. For water quality monitoring we will present the fabrication process and sensing properties of ion sensing membranes (ISM) selectively sensitive to ammonium (NH4+) and nitrates (NO3-) ions polluting ionic species. Functionalization of the ISM have been performed by adding ionophores of interest for each studied pollutant.
Domaines
Sciences de l'ingénieur [physics]
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A_Souifi et al_Nano S&T-2023_Towards Autonomous Smart Sensors Systems on CMOS technologies for real time environmental quality monitoring.pdf (86)
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