Environmental Sensors on CMOS technologies
Environmental Sensors on CMOS technologies
Résumé
Smart Sensors are crucial technological building blocks for a wide range of applications including information technologies, automotive, industrial systems, health monitoring and environmental quality monitoring. In the context of connected objects in the area of Internet of Things (IoT), ultra-low-power sensors integrated on CMOS is an interesting option for Wireless Sensor Nodes (WSN) for real-time environmental quality monitoring [2], [3].
In this work, we present the interest of Fully Depleted Silicon On Insulator (FDSOI) technologies for sensing applications. After a description of pH sensors (ISFETs) integrated on industrial 28 nm FDSOI CMOS, we present recent advances on sensing materials for environmental sensors for air and water quality monitoring. For air quality monitoring, we present low-temperature operation of NO2 resistive sensors based on SnO2 sensing layers and low-temperature operation of CO2 capacitive sensors based on hybrid polymers (PEI + SiO2 NPs) sensing layers. For water quality monitoring we present the fabrication process of ion sensing membranes (ISM) selectively sensitive to ammonium (NH4+) and nitrates (NO3-) ions polluting ionic species. Functionalization of the ISM are performed by adding ionophores of interest for each studied pollutant.
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