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Communication Dans Un Congrès Année : 1999

Synthesis of Crystalline Structures of CNx Thin Films Deposited on Sapphire, Quartz and Alumina Substrates

R. Alexandrescu
  • Fonction : Auteur
Raluca Cireasa
I. Morjan
  • Fonction : Auteur
A. Kumar
  • Fonction : Auteur
F. Vasiliu
  • Fonction : Auteur

Résumé

Carbon nitride films raise current interest for their potential applications as ultrahard materials. We report on the formation of crystalline CN structures in films deposited at 248 nm on different substrates (sapphire, quartz, alumina) using the laser-induced CVD method and a gas mixture containing ethylene/nitrous oxide and ammonia as carbon and nitrogen source, respectively. The structural and morphological properties of the films were characterized by different analytical techniques (SEM, TEM, TED and XPS).
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Dates et versions

hal-00540831 , version 1 (29-11-2010)

Identifiants

  • HAL Id : hal-00540831 , version 1

Citer

R. Alexandrescu, Raluca Cireasa, Aurelian Crunteanu, Costel Sorin Cojocaru, I. Morjan, et al.. Synthesis of Crystalline Structures of CNx Thin Films Deposited on Sapphire, Quartz and Alumina Substrates. MRS Fall meeting, 1998, United States. pp.413-418. ⟨hal-00540831⟩
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