Optical constants of magnetron sputtered aluminum in the range 17–1300 eV with improved accuracy and ultrahigh resolution in the L absorption edge region - Laboratoire Charles Fabry
Article Dans Une Revue Journal of Applied Physics Année : 2024

Optical constants of magnetron sputtered aluminum in the range 17–1300 eV with improved accuracy and ultrahigh resolution in the L absorption edge region

Résumé

This work determines a new set of EUV/x-ray optical constants for aluminum (Al), one of the most important materials in science and technology. Absolute photoabsorption (transmittance) measurements in the 17-1300 eV spectral range were performed on freestanding Al films protected by carbon (C) layers, to prevent oxidation. The dispersive portion of the refractive index was obtained via the Kramers-Kronig transformation. Our data provide significant improvements in accuracy compared to previously tabulated values and reveal fine structure in the Al L 1 and L 2,3 regions, with photon energy step sizes as small as 0.02 eV. The implications of this work in the successful realization of EUV/x-ray instruments and in the validation of atomic and molecular physics models, are also discussed.
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Dates et versions

hal-04797066 , version 1 (22-11-2024)

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Catherine Burcklen, Franck Delmotte, Jennifer Alameda, Farhad Salmassi, Eric Gullikson, et al.. Optical constants of magnetron sputtered aluminum in the range 17–1300 eV with improved accuracy and ultrahigh resolution in the L absorption edge region. Journal of Applied Physics, 2024, 136, pp.195106. ⟨10.1063/5.0233781⟩. ⟨hal-04797066⟩
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