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Poster De Conférence Année : 2022

XRR-GIXRF combined characterization of Mg/Sc multilayer

Résumé

The water window range, located between the absorption edges of carbon (285 eV) and oxygen (530 eV), along with the presence of nitrogen K absorption edge (395 eV), known for imaging biological samples, is also particularly interesting for spectroscopy in nitrogen K emission band. A crystal spectrometer equipped with suitable periodic multilayer with high reflectance is required for x-ray spectroscopy[1]. We studied the design and characterization of one such multilayer, the Mg/Sc multilayer. Various combinations of bilayer, trilayer, and multilayer systems of Mg/Sc with Cr as a capping layer, were fabricated and characterized. Bilayer and trilayer were prepared to study the interfaces (Cr-Mg, Cr-Sc, Mg-Sc) closely and hence facilitate analysis of the multilayer. The stacks are analysed using CASTOR (Chambre d’Analyse Spectrométrique en Transmission ou en Réflexion), an instrument dedicated for combined measurement of x-ray reflectivity (XRR) and grazing incidence x-ray fluorescence (GIXRF) analysis at SOLEIL, with an incident photon energy of 6.25keV. The combination of XRR, sensitive to the atomic density, and GIXRF, sensitive to element density, allows to obtain structural parameters as wells as elemental composition and depth concentration profiles of each of the element present in the stack. The combined analysis educes the uncertainties presented by each of the methods individually [2]. [Cr/Mg/Sc]x50 multilayer shows the reflectivity of 19% at energy 6.25keV (1st Bragg peak at angle 0.61°) with slight intermixing at Mg-Sc interface, and no interdiffusion at Cr-Mg interface. Hence, such a multilayer could be a good candidate for its application in x-ray spectroscopy
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Dates et versions

hal-03936384 , version 1 (24-02-2023)

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  • HAL Id : hal-03936384 , version 1

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Hina Verma, Karine Le Guen, Yves Ménesguen, Renaud Delaunay, Marie-Christine Lépy, et al.. XRR-GIXRF combined characterization of Mg/Sc multilayer. EXRS 2022, European Conference on X-ray Spectrometry, Jun 2022, Bruges, Belgium. , 2022. ⟨hal-03936384⟩
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