Piezoelectric Micromachined Microphone with High Acoustic Overload Point and with Electrically Controlled Sensitivity - Techniques of Informatics and Microelectronics for integrated systems Architecture
Article Dans Une Revue Micromachines Année : 2024

Piezoelectric Micromachined Microphone with High Acoustic Overload Point and with Electrically Controlled Sensitivity

Libor Rufer
Didace Ekeom
  • Fonction : Auteur
Skandar Basrour

Résumé

Currently, the most advanced micromachined microphones on the market are based on a capacitive coupling principle. Capacitive micro-electromechanical-system-based (MEMS) microphones resemble their millimetric counterparts, both in function and in performance. The most advanced MEMS microphones reached a competitive level compared to commonly used measuring microphones in most of the key performance parameters except the acoustic overload point (AOP). In an effort to find a solution for the measurement of high-level acoustic fields, microphones with the piezoelectric coupling principle have been proposed. These novel microphones exploit the piezoelectric effect of a thin layer of aluminum nitride, which is incorporated in their diaphragm structure. In these microphones fabricated with micromachining technology, no fixed electrode is necessary, in contrast to capacitive microphones. This specificity significantly simplifies both the design and the fabrication and opens the door for the improvement of the acoustic overload point, as well as harsh environmental applications. Several variations of piezoelectric structures together with an idea leading to electrically controlled sensitivity of MEMS piezoelectric microphones are discussed in this paper.

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Dates et versions

hal-04634680 , version 1 (04-07-2024)

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Libor Rufer, Josue Esteves, Didace Ekeom, Skandar Basrour. Piezoelectric Micromachined Microphone with High Acoustic Overload Point and with Electrically Controlled Sensitivity. Micromachines, 2024, 15 (7), pp.879. ⟨10.3390/mi15070879⟩. ⟨hal-04634680⟩

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