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Article Dans Une Revue Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Année : 2007

Influence of asymmetric etching on ion track shapes in polycarbonate

Résumé

By combining low-energy ion irradiation with asymmetric etching, conical nanopores of controlled geometry can be etched in poly-carbonate (PC). Cone bases vary from 0.5 to 1 lm. Top diameters down to 17 nm are reached. When etching from one side, the pH on the other side (bathed in neutral or acidic buffer) was monitored. Etching temperature ranged from 65 °C to 80 °C. Pore shape characterization was achieved by electro replication combined with SEM observation. The tip shape depended on whether an acidic buffer was used or not on the stopped side.

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hal-01129024 , version 1 (11-03-2015)

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M.-C Clochard, Travis L Wade, J.-E Wegrowe, Emmanuel Balanzat. Influence of asymmetric etching on ion track shapes in polycarbonate. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2007, 265 (1), pp.325-329. ⟨10.1016/j.nimb.2007.08.065⟩. ⟨hal-01129024⟩
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