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Article Dans Une Revue Optics Letters Année : 2011

Multiple wavelengths reflectance microscopy to study the multi-physical behavior of MEMS

Résumé

In order to characterize surface chemomechanical driving micro-electro-mechanical systems (MEMS) behavior, we propose herein a method to simultaneously obtain a full kinematic field describing the surface displacement and a map of its chemical modification from optical measurements. Using a microscope, reflected intensity fields are recorded for two different illumination wavelengths. Decoupling the wavelength-independent and -dependent contributions to the measured relative intensity changes then yields the sought fields. This method is applied to the investigation of the electro-elastic coupling, providing images of both the local surface electrical charge density and the device deformation field.
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Dates et versions

hal-00567440 , version 1 (21-02-2011)

Identifiants

Citer

N. Garraud, Y. Fedala, F. Kanoufi, G. Teissier, J.P. Roger, et al.. Multiple wavelengths reflectance microscopy to study the multi-physical behavior of MEMS. Optics Letters, 2011, 36 (4), pp.594-596. ⟨10.1364/OL.36.000594⟩. ⟨hal-00567440⟩
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