Design and modeling of a piezoelectrically actuated microvalve.
Résumé
In this paper, we propose and model a new microvalve design based on a unimorph piezoelectric bending cantilever. When the piezoelectric structure is electrically driven, the valve opens with precise angles allowing smooth flow control. In order to understand the whole system dynamic behavior, a physical model is developed. While the developed model is strongly nonlinear.
Origine : Fichiers produits par l'(les) auteur(s)
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