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Article Dans Une Revue European Physical Journal: Applied Physics Année : 2008

Back-illuminated CCD for coherent soft X-ray imaging

Résumé

Direct-illumination CCDs find increasing use in coherent X-ray imaging due to their good spatial resolution and signal-to-noise ratio. These CCDs offer a high quantum efficiency for soft X-rays near the 3d transition metal L edges. We compare front- and back-illuminated CCDs and describe a method to obtain images with a large dynamic range (five orders of magnitude) and high spatial resolution. Back-illuminated CCDs are resistant to radiation damage at the soft X-ray energies and provide a true 13.5 μm pixel resolution. High quality diffraction images are obtained in magnetic studies from metallic multilayer structures in reflection geometry.
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Dates et versions

hal-00752471 , version 1 (15-11-2012)

Identifiants

  • HAL Id : hal-00752471 , version 1

Citer

G. Beutier, G. van Der Laan, A. Marty, F. Livet. Back-illuminated CCD for coherent soft X-ray imaging. European Physical Journal: Applied Physics, 2008, 42, pp.161-167. ⟨hal-00752471⟩
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