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Article Dans Une Revue Microelectronic Engineering Année : 2011

Realization of ultra dense arrays of vertical silicon NWs with defect free surface and perfect anisotropy using a top-down approach

X.L. Han
  • Fonction : Auteur
G. Larrieu
  • Fonction : Auteur
Pier-Francesco Fazzini

Dates et versions

hal-00795901 , version 1 (01-03-2013)

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X.L. Han, G. Larrieu, Pier-Francesco Fazzini, Emmanuel Dubois. Realization of ultra dense arrays of vertical silicon NWs with defect free surface and perfect anisotropy using a top-down approach. Microelectronic Engineering, 2011, 88, pp.2622-2624. ⟨10.1016/j.mee.2010.12.102⟩. ⟨hal-00795901⟩
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