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Article Dans Une Revue Journal of Vacuum Science & Technology A Année : 2017

Low-temperature and scalable CVD route to WS2 monolayers on SiO2/Si substrates

Résumé

Tungsten disulfide (WS2) monolayers are promising for next-generation flat electronics, but few scalable deposition methods are currently available. Here, the authors report the fabrication of tungsten disulfide monolayers through a novel two-step chemical vapor deposition process involving the deposition of an amorphous tungsten sulfide layer at a relatively mild temperature from the W(CO)6 and 1,2-ethanedithiol precursors, followed by a short annealing at 800 °C under an inert atmosphere. This two-step process allows the fabrication of a crystalline WS2 deposit with a low thermal budget. Raman, x-ray photoelectron, and wavelength dispersive x-ray fluorescence spectroscopic studies performed before and after annealing confirmed the deposition of a sulfur-rich amorphous intermediate, and further confirmed its conversion upon annealing toward oriented 2D WS2 crystals in the 1–2 monolayer range, as corroborated by high-resolution transmission electron microscopy.

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Chimie
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Dates et versions

hal-01872852 , version 1 (12-09-2018)

Identifiants

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Stéphane Cadot, Olivier Renault, Denis Rouchon, Denis Mariolle, Emmanuel Nolot, et al.. Low-temperature and scalable CVD route to WS2 monolayers on SiO2/Si substrates. Journal of Vacuum Science & Technology A, 2017, 35 (6), pp.061502. ⟨10.1116/1.4996550⟩. ⟨hal-01872852⟩
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