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Article Dans Une Revue European Physical Journal: Applied Physics Année : 2014

Nanostructural defects evidenced in failing silicon-based NMOS capacitors by advanced failure analysis techniques

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Matériaux

Dates et versions

hal-01951260 , version 1 (11-12-2018)

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Emilie Faivre, Roxane Llido, Magali Putero, Lahouari Fares, Christophe Muller. Nanostructural defects evidenced in failing silicon-based NMOS capacitors by advanced failure analysis techniques. European Physical Journal: Applied Physics, 2014, 66 (1), pp.10103. ⟨10.1051/epjap/2014130386⟩. ⟨hal-01951260⟩
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