The IMPACT Project : Merging academic research and 300mm industrial applications Quasi in situ advanced characterizations for Materials upfront studies and Process development in microelectronics - CNRS - Centre national de la recherche scientifique Accéder directement au contenu
Communication Dans Un Congrès Année : 2019

The IMPACT Project : Merging academic research and 300mm industrial applications Quasi in situ advanced characterizations for Materials upfront studies and Process development in microelectronics

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hal-02331976 , version 1 (24-10-2019)

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  • HAL Id : hal-02331976 , version 1

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Bernard Pelissier. The IMPACT Project : Merging academic research and 300mm industrial applications Quasi in situ advanced characterizations for Materials upfront studies and Process development in microelectronics. XPS Workshop ThermoFisher, Jun 2019, Versailles, France. ⟨hal-02331976⟩
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