2D-Nano-Ptychography Imaging Results on the SWING Beamline at Synchrotron SOLEIL
Résumé
A new Nanoprobe system, which was originally developed in the scope of a collaboration with MAXIV (Sweden), has recently been tested and validated on the SWING beamline in Synchrotron SOLEIL. The aim of the project was to construct a Ptychography nano-imaging station. Initial steps were taken to provide a portable system capable of nanometric scans of samples with sizes ranging from the micrometer to fractions of a millimeter. Imaging was made possible by actuating a total of 16 Degrees Of Freedom (DOF) composed of a sample stage (3 DOF), a central stop stage (5 DOF), a Fresnel zone plate stage (5 DOF), as well as an order sorting aperture stage (3 DOF). These stages were actuated by an ensemble of piezo-driven and high-quality brushless motors, of which synchronized control (with kinematic modelling) was done using the Delta Tau platform. In addition, interferometry feedback was used for reconstruction purposes. Imaging results are promising: the system was able to resolve 40 nm measured with a Siemens star, the paper will describe the system and the achieved results.