@article{resende:hal-03017737, TITLE = {{Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films}}, AUTHOR = {Resende, Joao and Fuard, David and Le Cunff, Delphine and Tortai, Jean-Herve and Pelissier, Bernard}, URL = {https://cnrs.hal.science/hal-03017737}, JOURNAL = {{Materials Chemistry and Physics}}, PUBLISHER = {{Elsevier}}, VOLUME = {259}, PAGES = {124000}, YEAR = {2020}, MONTH = Oct, DOI = {10.1016/j.matchemphys.2020.124000}, PDF = {https://cnrs.hal.science/hal-03017737/file/Manuscript%20-%20SURFCOAT-S-20-03635%20-%20Revision%20Clean.pdf}, HAL_ID = {hal-03017737}, HAL_VERSION = {v1}, }