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Communication Dans Un Congrès Année : 2020

New generation of composite substrates based on a layer of LiTaO3 on silicon for surface acoustic waves components

Résumé

The development of new generations of telecommunication systems requires more and more components and radio-frequency (RF) modules to select and the process signals supporting the information. The solution the most used for this kind of application is always based on the principle of surface acoustic waves (SAW) and its associated components, taking into account their unique spectral quality (insertion losses, out of band rejection, group delay?), their design flexibility and their compactness for L- and S-bands. Although still commonly used today, filters on single-crystals such as lithium tantalate (LiTaO3) and lithium niobate (LiNbO3) cannot be used for future RF modules since the intrinsic stability of these substrates is far from being adapted to meet the challenges of modern telecommunications. To respond to this demands, a new generation of substrates is necessary. The main idea of the work presented here then consists in combining a thin piezoelectric film and a substrate having a thermal expansion much lower than that of piezoelectric layer. This kind of structure is named POI for Piezoelectric-On-Insulator. Although studied for years, this solution is meeting a growing interest given the advantages it offers for SAW filters. We propose to present a review of the concepts as well as the work which led to these developments. An overview of the different technologies enabling the manufacture of these composite substrates will also be proposed. Figures of merit on test vehicles as well as examples of applications will be presented in order to highlight the potential of this new technological solution. Finally, we will conclude on the interest and prospects of such a structure for the telecommunications and wireless sensors, compared to single-crystals substrates.
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Dates et versions

hal-03231876 , version 1 (21-05-2021)

Identifiants

Citer

Alexandre Clairet, Emilie Courjon, Thierry Laroche, Florent Bernard, Alexandre Raveski, et al.. New generation of composite substrates based on a layer of LiTaO3 on silicon for surface acoustic waves components. Forum Acusticum, Dec 2020, Lyon, France. pp.2527-2533, ⟨10.48465/fa.2020.0157⟩. ⟨hal-03231876⟩
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