Strong room-temperature blue emission from rapid-thermal annealed cerium-doped aluminum (oxy)nitride thin films
Résumé
Cerium-doped aluminum nitride (Ce-AlN) thin films were prepared at room temperature (RT) using radio frequency (RF) reactive sputtering. As-grown samples were then subjected to rapid thermal annealing (RTA). X-ray diffraction and high resolution transmission electron microscopy (HRTEM) revealed a well crystalline textured microstructure with single [002] out-of-plane orientation in both as-grown and annealed
Domaines
Matériaux
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