%0 Journal Article %T Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors %+ Laboratoire des technologies de la microélectronique (LTM ) %+ Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI) %A Alfonso, M.S., S %A Lapeyronie, C. %A Goubet, M. %A Viala, B. %A Tortai, J. H. %< avec comité de lecture %@ 0266-3538 %J Composites Science and Technology %I Elsevier %V 216 %P 109063 %8 2021 %D 2021 %R 10.1016/j.compscitech.2021.109063 %K Nano Composite %K Nano particles %K Core-shell nanostructures %K Dielectric properties %K Polymer-matrix composites %Z Engineering Sciences [physics]/Materials %Z Engineering Sciences [physics]/Micro and nanotechnologies/MicroelectronicsJournal articles %X High-k nanocomposite photoresists are highly sought-after dielectric materials for the manufacturing and miniaturization of integrated capacitors. Herein, in-depth high voltage dielectric characterizations of Metal Polymer Composites (MPCs) having carbon-coated nickel nanoparticles (Ni@C) dispersed into epoxy-based photoresist (SU-8) are reported. ±0.38 MV/cm occurred. This study shows a reliable wafer-scale film fabrication process of MPCs for the manufacturing of long-awaited miniaturization of high-voltage capacitors. %G English %2 https://cnrs.hal.science/hal-03367966/document %2 https://cnrs.hal.science/hal-03367966/file/REVISITED%20-%20MPCs%20Epoxy%20based%20photoresist%20nanocomposites.pdf %L hal-03367966 %U https://cnrs.hal.science/hal-03367966 %~ CEA %~ UGA %~ CNRS %~ LTM %~ DRT %~ LETI %~ CEA-GRE %~ UGA-EPE %~ MINASEE %~ PROSPECT