%0 Journal Article %T 3D kinetic Monte-Carlo simulations of diamond growth on (1 0 0) surfaces %+ Laboratoire des Sciences des Procédés et des Matériaux (LSPM) %+ Université Sorbonne Paris Nord %+ Laboratoire des Sciences des Procédés et des Matériaux (LSPM) %A Valentin, Audrey %A Brinza, Ovidiu %A Farhat, Samir %A Achard, Jocelyn %A Bénédic, Fabien %< avec comité de lecture %@ 0925-9635 %J Diamond and Related Materials %I Elsevier %P 108865 %8 2022-01 %D 2022 %R 10.1016/j.diamond.2022.108865 %Z Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] %Z Engineering Sciences [physics]/Chemical and Process Engineering %Z Engineering Sciences [physics]/Materials %Z Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics %Z Engineering Sciences [physics]/ElectronicsJournal articles %G English %2 https://cnrs.hal.science/hal-03544300/document %2 https://cnrs.hal.science/hal-03544300/file/ArticleICDCM2021preprint.pdf %L hal-03544300 %U https://cnrs.hal.science/hal-03544300 %~ UNIV-PARIS13 %~ CNRS %~ LSPM_P13 %~ GALILE %~ SORBONNE-PARIS-NORD