Improved performance of transparent p-type conductors CuCrO2:Mg delafossite thin films through easy and low cost laser annealing - CNRS - Centre national de la recherche scientifique Accéder directement au contenu
Article Dans Une Revue Materials Letters Année : 2022

Improved performance of transparent p-type conductors CuCrO2:Mg delafossite thin films through easy and low cost laser annealing

Résumé

Films deposited on glass substrate by RF sputtering, were heat treated in air by a low power laser spot thanks to conventional photolithography machine, to obtain pure CuCr 0.97 Mg 0.03 O 2 delafossite with an optical transmittance of 0.58 and a conductivity of 5.8S.cm − 1. The Haacke's figure of merit is improved to reach 2.07 × 10-7 Ω − 1. Laser annealing by a photolithography machine is thus very interesting for enhancing the p-type transparent conductor properties of such delafossite phases. A local annealing according to selected patterns could also be envisaged, opening up exciting prospects for fast and low cost making the most of these transparent ptype semiconductors.
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Dates et versions

hal-03819782 , version 1 (19-10-2022)

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Frédéric Veron, Isabelle Pasquet, Yohann Thimont, Antoine Barnabé, Philippe Tailhades. Improved performance of transparent p-type conductors CuCrO2:Mg delafossite thin films through easy and low cost laser annealing. Materials Letters, 2022, 313, pp.131795. ⟨10.1016/j.matlet.2022.131795⟩. ⟨hal-03819782⟩
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