%0 Journal Article %T Gallium nitride surface protection during RTA annealing with a GaO x N y cap-layer %+ Centre de Recherche sur la Matière Divisée (CRMD) %A Khalfaoui, Wahid %A Oheix, T %A Cayrel, F %A Benoit, R %A Yvon, A %A Collard, E %A Alquier, D %< avec comité de lecture %@ 0268-1242 %J Semiconductor Science and Technology %I IOP Publishing %V 31 %N 4 %P 045008 %8 2016-04-01 %D 2016 %R 10.1088/0268-1242/31/4/045008 %Z Chemical SciencesJournal articles %G English %L hal-03878824 %U https://cnrs.hal.science/hal-03878824 %~ CNRS %~ UNIV-ORLEANS %~ ICMN