Development of a plasma source dedicated to the enhancement of the atmospheric pressure spatial atomic layer deposition. - CNRS - Centre national de la recherche scientifique
Communication Dans Un Congrès Année : 2023
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hal-04264413 , version 1 (30-10-2023)

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  • HAL Id : hal-04264413 , version 1

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Tian Tian, Gervais Ndiffo Yemeli, Hervé Rabat, Olivier Aubry, Gilles Charles, et al.. Development of a plasma source dedicated to the enhancement of the atmospheric pressure spatial atomic layer deposition.. XXIIIth International Conference on Gas Discharges and Their Applications, Sep 2023, Greifswald, Germany. ⟨hal-04264413⟩
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