Laser doping for microelectronics and microtechnology - CNRS - Centre national de la recherche scientifique
Proceedings Year : 2004

Laser doping for microelectronics and microtechnology

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hal-04843984 , version 1 (17-12-2024)

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Thierry Sarnet, Gurwan Kerrien, Nourdin Yaakoubi, Alain Bosseboeuf, Elisabeth Dufour-Gergam, et al.. Laser doping for microelectronics and microtechnology. High-Power Laser Ablation 2004, pp.669, 2004, ISBN 0-8194-5371-4. ⟨10.1117/12.547759⟩. ⟨hal-04843984⟩
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