Article Dans Une Revue Applied Surface Science Année : 2003

Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments

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hal-04844020 , version 1 (17-12-2024)

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M. Hernandez, J. Venturini, D. Zahorski, J. Boulmer, D. Débarre, et al.. Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments. Applied Surface Science, 2003, 208-209, pp.345-351. ⟨10.1016/S0169-4332(02)01395-8⟩. ⟨hal-04844020⟩
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