Journal Articles AIP Conf. Proc. USA Year : 2008

Ultra-Shallow Junctions Fabrication by Plasma Immersion Implantation on PULSION® Followed by Laser Thermal Processing

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hal-04844214 , version 1 (17-12-2024)

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Frank Torregrosa, Hasnaa Etienne, Guillaume Sempere, Gilles Mathieu, Laurent Roux, et al.. Ultra-Shallow Junctions Fabrication by Plasma Immersion Implantation on PULSION® Followed by Laser Thermal Processing. AIP Conf. Proc. USA, 2008, 1066, pp.473-476. ⟨10.1063/1.3033665⟩. ⟨hal-04844214⟩
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