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authFullName_s : Bernard Pelissier

Electrical and optical localisation of leakage current and breakdown point in SiOC:H low-k dielectrics

Matthias Vidal-Dhô , Quentin Hubert , Patrice Gonon , Bernard Pelissier , Philippe Lentrein et al.
2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS), May 2020, Edinburgh, United Kingdom. pp.1-4, ⟨10.1109/ICMTS48187.2020.9107909⟩
Conference papers hal-02916807v1

Investigations on residual chemical contamination on machining aluminum components of Turbo Molecular Pumps

Andrea Vinci , Bernard Pelissier , Le Guet Catherine , Hervé Fontaine , René-Louis Inglebert. et al.
Vacuum, 2014, 110, pp.7-18. ⟨10.1016/j.vacuum.2014.07.031⟩
Journal articles hal-01798341v1

Analyse par XPS d’empilements high-k metal gate et corrélation des décalages d’énergie de liaison à la présence de charge

Charly Fontaine , Bernard Pelissier , Mickael Gros-Jean , Thierry Chevolleau
ELSPEC 2018, Jun 2018, Biarritz, France
Conference papers hal-01961096v1

Oxidation Process in Ge-Rich GeSbTe Alloy for Phase-Change Memory: Mechanism, Kinetic and N-Doping Influence

Ludovic Goffart , Christophe Vallée , Gabriele Navarro , Jean-Philippe Reynard , Bernard Pelissier et al.
ECS PRiME 2020, Oct 2020, Hawaï, United States. pp.1358-1358, ⟨10.1149/ma2020-02141358mtgabs⟩
Conference papers hal-03370192v1
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Seed Surface Preparation for SiC Sublimation Growth

Bernard Pelissier , Cécile Moulin , Etienne Pernot , Mikhail Anikin , Philippe Grosse et al.
Materials Science Forum, 2000, 338/342, pp.47-50. ⟨10.4028/www.scientific.net/MSF.338-342.47⟩
Journal articles hal-00685132v1
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H$_3$PO$_4$-based wet chemical etching for recovery of dry-etched GaN surfaces

Sabria Benrabah , Maxime Legallais , Pascal Besson , Simon Ruel , Laura Vauche et al.
Applied Surface Science, 2021, 582, pp.152309. ⟨10.1016/j.apsusc.2021.152309⟩
Journal articles hal-03805061v1

200 mm-scale growth of 2D layered GaSe with preferential orientation

Mickaël Martin , Pascal Pochet , Hanako Okuno , Carlos Alvarez , Edith Bellet-Amalric et al.
APL Materials, 2022, 10 (5), pp.051106. ⟨10.1063/5.0087684⟩
Journal articles hal-03694297v1
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Chemical Bath Deposition of ZnO Nanowires Using Copper Nitrate as an Additive for Compensating Doping

Clément Lausecker , Bassem Salem , Xavier Baillin , Odette Chaix-Pluchery , Herve Roussel et al.
Inorganic Chemistry, 2021, 60 (3), pp.1612-1623. ⟨10.1021/acs.inorgchem.0c03086⟩
Journal articles hal-03131100v1

The IMPACT Project : Merging academic research and 300mm industrial applications Quasi in situ advanced characterizations for Materials upfront studies and Process development in microelectronics

Bernard Pelissier
XPS Workshop ThermoFisher, Jun 2019, Versailles, France
Conference papers hal-02331976v1

Use of optical spacers to enhance infrared Mueller ellipsometry sensitivity: application to the characterization of organic thin films

Gérald Ndong , Angel Lizana , Enric Garcia-Caurel , Valerie Paret , Géraldine Melizzi et al.
Applied optics, 2016, 55 (12), pp.436 - 439. ⟨10.1364/AO.55.003323⟩
Journal articles hal-01882073v1

Procédé de transport et de stockage d'une plaque semiconductrice en enceinte hermetique

Bernard Pelissier
France, Patent n° : B15423 FR. 2016
Patents hal-01905033v1

The IMPACT Project and concept : Vacuum transfer for quasi insitu analyses

Bernard Pelissier
Contamination Workshop, Apr 2019, Annecy, France
Conference papers hal-02331944v1
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Improvement of AlN Film Quality Using Plasma Enhanced Atomic Layer Deposition with Substrate Biasing

Maxime Legallais , Hussein Mehdi , Sylvain David , Franck Bassani , Sébastien Labau et al.
ACS Applied Materials & Interfaces, 2020, 12 (35), pp.39870-39880. ⟨10.1021/acsami.0c10515⟩
Journal articles hal-03030507v1

Evaluation of plasma parameters on PEALD deposited TaCN

Fabien Piallat , Virginie Beugin , Remy Gassilloud , Philippe Michallon , Laurent Dussault et al.
Microelectronic Engineering, 2013, 107, pp.156-160. ⟨10.1016/j.mee.2012.08.020⟩
Journal articles hal-00908477v1
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Area selective deposition of TiO 2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme

Rémi Vallat , Rémy Gassilloud , Olivier Salicio , Khalil El Hajjam , Gabriel Molas et al.
Journal of Vacuum Science & Technology A, 2019, 37 (2), pp.020918. ⟨10.1116/1.5049361⟩
Journal articles hal-02108939v1

Quasi insitu XPS characterization applied to PEALD selective deposition of TiO2 - The IMPACT 300mm project and platform: merging academic research and industrial applications in microelectronic

Bernard Pelissier
30th World Nano Conference, May 2019, Zurich, Switzerland
Conference papers hal-02117215v1

XPS ANALYSIS OF METAL/OXIDE PILE AND CORRELATION BETWEEN BINDING ENERGY SHIFT AND PHYSICAL-CHEMICAL EFFECTS DUE TO DIFFERENT ANNEALING PROCESSES

Charly Fontaine , Bernard Pelissier , Mickael Gros-Jean , Thierry Chevolleau
EUROMAT 2017, Sep 2017, Thessalonique, Greece
Conference papers hal-01960712v1

Chemical Stability of Si-SiC Nanostructures under Physiological Conditions

Romain Bange , Edwige Bano , Laetitia Rapenne , Sébastien Labau , Bernard Pelissier et al.
11 th European Conference on Silicon Carbide and Related Materials (ECSCRM), Sep 2016, Halkidiki, Greece
Conference papers hal-02008265v1

Depth profiling analysis of HfON on SiON ultrathin films by parallel angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering

Laurent Fauquier , Bernard Pelissier , Denis Jalabert , Francois Pierre , Delphine Doloy et al.
Surface and Interface Analysis, 2016, 48 (7), pp.436 - 439. ⟨10.1002/sia.5917⟩
Journal articles istex hal-01881936v1

Hybridization of ellipsometry and XPS energy loss: robust band gap and broadband optical constants determination of thin films

Théo Levert , Jon De Vecchy , Julien Duval , Stéphan Verdier , Delphine Le Cunff et al.
Journées Nationales des Spectroscopies de PhotoEmission, May 2022, Dijon, France
Conference papers hal-03777894v1
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Mechanism of Spin‐Orbit Torques in Platinum Oxide Systems

Jayshankar Nath , Alexandru Vladimir Trifu , Mihai Sebastian Gabor , Ali Hallal , Stephane Auffret et al.
Advanced Electronic Materials, 2022, 8 (7), pp.2101335. ⟨10.1002/aelm.202101335⟩
Journal articles hal-03740717v1

Generation and characterization of soybean and marker-free tobacco plastid transformants over-expressing a bacterial 4-hydroxyphenylpyruvate dioxygenase which provides strong herbicide tolerance

Nathalie Dufourmantel , Manuel Dubald , Michel Matringe , Hélène Canard , Frédéric Garcon et al.
Plant Biotechnology Journal, 2007, 5 (1), pp.118 - 133. ⟨10.1111/j.1467-7652.2006.00226.x⟩
Journal articles istex hal-00121111v1
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Physicochemical and electrical characterizations of atomic layer deposition grown HfO(2) on TiN and Pt for metal-insulator-metal application

Corentin Jorel , Christophe Vallée , Emmanuel Gourvest , Bernard Pelissier , Marceline Bonvalot et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27 (1), pp.378. ⟨10.1116/1.3021036⟩
Journal articles hal-00633071v1

Développement d’un capteur environnemental ultra-basse consommation à base de SnO2 en technologie CMOS FDSOI

Antonio Assaf , João Resende , Levert Theo , Bernard Pelissier , Infante Ingrid C. et al.
Journées de la matière condensée (JMC17), Société française de physique (SFP), Aug 2021, Rennes, France
Conference papers hal-03375553v1

Impact of Wet Treatments on the Electrical Performance of Ge 0.9 Sn 0.1 -Based p-MOS Capacitors

Mohamed Aymen Mahjoub , Thibault Haffner , Sébastien Labau , Etienne Eustache , Joris Aubin et al.
ACS Applied Electronic Materials, 2019, 1 (2), pp.260-268. ⟨10.1021/acsaelm.8b00099⟩
Journal articles hal-02051071v1

XPS analysis of metal/oxide stack and correlation between binding energy shift and electrical properties

Charly Fontaine , Bernard Pelissier , Mickael Gros-Jean , Thierry Chevolleau
ECASIA 2017, Sep 2017, Montpellier, France
Conference poster hal-01960786v1

First Experimental Functionalization Results of SiC Nanopillars for Biosensing Applications

Louis Fradetal , Valérie Stambouli , Edwige Bano , Bernard Pelissier , Katarzyna Wierzbowska et al.
Materials Science Forum, 2013, 740-742, pp.821-824
Journal articles hal-02006461v1

Quasi insitu XPS characterization applied to PEALD selective deposition of TiO2 The IMPACT 300mm project and platform: merging academic research and industrial applications in microelectronic

Bernard Pelissier
30th World nanoconference, May 2019, Zurich, Switzerland
Conference papers hal-02331961v1

Développement de capteurs environnementaux ultra-basse consommation à base de SnO2

Antonio Assaf , Bernard Pelissier , Theo Levert , Ingrid Cañero Infante , Bassem Salem et al.
4th international workshop of IEEE Sensors, Nov 2021, Marseille, France
Conference papers hal-03503960v1
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Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

Joao Resende , David Fuard , Delphine Le Cunff , Jean-Herve Tortai , Bernard Pelissier et al.
Materials Chemistry and Physics, 2020, 259, pp.124000. ⟨10.1016/j.matchemphys.2020.124000⟩
Journal articles hal-03017737v1