Electrical and optical localisation of leakage current and breakdown point in SiOC:H low-k dielectrics
Matthias Vidal-Dhô
,
Quentin Hubert
,
Patrice Gonon
,
Bernard Pelissier
,
Philippe Lentrein
et al.
Conference papers
hal-02916807v1
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Investigations on residual chemical contamination on machining aluminum components of Turbo Molecular Pumps
Andrea Vinci
,
Bernard Pelissier
,
Le Guet Catherine
,
Hervé Fontaine
,
René-Louis Inglebert.
et al.
Journal articles
hal-01798341v1
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Analyse par XPS d’empilements high-k metal gate et corrélation des décalages d’énergie de liaison à la présence de charge
Charly Fontaine
,
Bernard Pelissier
,
Mickael Gros-Jean
,
Thierry Chevolleau
ELSPEC 2018 , Jun 2018, Biarritz, France
Conference papers
hal-01961096v1
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Oxidation Process in Ge-Rich GeSbTe Alloy for Phase-Change Memory: Mechanism, Kinetic and N-Doping Influence
Ludovic Goffart
,
Christophe Vallée
,
Gabriele Navarro
,
Jean-Philippe Reynard
,
Bernard Pelissier
et al.
Conference papers
hal-03370192v1
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Seed Surface Preparation for SiC Sublimation Growth
Bernard Pelissier
,
Cécile Moulin
,
Etienne Pernot
,
Mikhail Anikin
,
Philippe Grosse
et al.
Journal articles
hal-00685132v1
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H$_3$PO$_4$-based wet chemical etching for recovery of dry-etched GaN surfaces
Sabria Benrabah
,
Maxime Legallais
,
Pascal Besson
,
Simon Ruel
,
Laura Vauche
et al.
Journal articles
hal-03805061v1
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200 mm-scale growth of 2D layered GaSe with preferential orientation
Mickaël Martin
,
Pascal Pochet
,
Hanako Okuno
,
Carlos Alvarez
,
Edith Bellet-Amalric
et al.
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hal-03694297v1
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Chemical Bath Deposition of ZnO Nanowires Using Copper Nitrate as an Additive for Compensating Doping
Clément Lausecker
,
Bassem Salem
,
Xavier Baillin
,
Odette Chaix-Pluchery
,
Herve Roussel
et al.
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hal-03131100v1
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The IMPACT Project : Merging academic research and 300mm industrial applications Quasi in situ advanced characterizations for Materials upfront studies and Process development in microelectronics
Bernard Pelissier
XPS Workshop ThermoFisher , Jun 2019, Versailles, France
Conference papers
hal-02331976v1
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Use of optical spacers to enhance infrared Mueller ellipsometry sensitivity: application to the characterization of organic thin films
Gérald Ndong
,
Angel Lizana
,
Enric Garcia-Caurel
,
Valerie Paret
,
Géraldine Melizzi
et al.
Journal articles
hal-01882073v1
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Procédé de transport et de stockage d'une plaque semiconductrice en enceinte hermetique
Bernard Pelissier
France, Patent n° : B15423 FR. 2016
Patents
hal-01905033v1
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The IMPACT Project and concept : Vacuum transfer for quasi insitu analyses
Bernard Pelissier
Contamination Workshop , Apr 2019, Annecy, France
Conference papers
hal-02331944v1
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Improvement of AlN Film Quality Using Plasma Enhanced Atomic Layer Deposition with Substrate Biasing
Maxime Legallais
,
Hussein Mehdi
,
Sylvain David
,
Franck Bassani
,
Sébastien Labau
et al.
Journal articles
hal-03030507v1
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Evaluation of plasma parameters on PEALD deposited TaCN
Fabien Piallat
,
Virginie Beugin
,
Remy Gassilloud
,
Philippe Michallon
,
Laurent Dussault
et al.
Journal articles
hal-00908477v1
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Area selective deposition of TiO 2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
Rémi Vallat
,
Rémy Gassilloud
,
Olivier Salicio
,
Khalil El Hajjam
,
Gabriel Molas
et al.
Journal articles
hal-02108939v1
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Quasi insitu XPS characterization applied to PEALD selective deposition of TiO2 - The IMPACT 300mm project and platform: merging academic research and industrial applications in microelectronic
Bernard Pelissier
30th World Nano Conference , May 2019, Zurich, Switzerland
Conference papers
hal-02117215v1
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XPS ANALYSIS OF METAL/OXIDE PILE AND CORRELATION BETWEEN BINDING ENERGY SHIFT AND PHYSICAL-CHEMICAL EFFECTS DUE TO DIFFERENT ANNEALING PROCESSES
Charly Fontaine
,
Bernard Pelissier
,
Mickael Gros-Jean
,
Thierry Chevolleau
EUROMAT 2017 , Sep 2017, Thessalonique, Greece
Conference papers
hal-01960712v1
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Chemical Stability of Si-SiC Nanostructures under Physiological Conditions
Romain Bange
,
Edwige Bano
,
Laetitia Rapenne
,
Sébastien Labau
,
Bernard Pelissier
et al.
11 th European Conference on Silicon Carbide and Related Materials (ECSCRM) , Sep 2016, Halkidiki, Greece
Conference papers
hal-02008265v1
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Depth profiling analysis of HfON on SiON ultrathin films by parallel angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering
Laurent Fauquier
,
Bernard Pelissier
,
Denis Jalabert
,
Francois Pierre
,
Delphine Doloy
et al.
Journal articles
istex
hal-01881936v1
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Hybridization of ellipsometry and XPS energy loss: robust band gap and broadband optical constants determination of thin films
Théo Levert
,
Jon De Vecchy
,
Julien Duval
,
Stéphan Verdier
,
Delphine Le Cunff
et al.
Journées Nationales des Spectroscopies de PhotoEmission , May 2022, Dijon, France
Conference papers
hal-03777894v1
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Mechanism of Spin‐Orbit Torques in Platinum Oxide Systems
Jayshankar Nath
,
Alexandru Vladimir Trifu
,
Mihai Sebastian Gabor
,
Ali Hallal
,
Stephane Auffret
et al.
Journal articles
hal-03740717v1
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Generation and characterization of soybean and marker-free tobacco plastid transformants over-expressing a bacterial 4-hydroxyphenylpyruvate dioxygenase which provides strong herbicide tolerance
Nathalie Dufourmantel
,
Manuel Dubald
,
Michel Matringe
,
Hélène Canard
,
Frédéric Garcon
et al.
Journal articles
istex
hal-00121111v1
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Physicochemical and electrical characterizations of atomic layer deposition grown HfO(2) on TiN and Pt for metal-insulator-metal application
Corentin Jorel
,
Christophe Vallée
,
Emmanuel Gourvest
,
Bernard Pelissier
,
Marceline Bonvalot
et al.
Journal articles
hal-00633071v1
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Développement d’un capteur environnemental ultra-basse consommation à base de SnO2 en technologie CMOS FDSOI
Antonio Assaf
,
João Resende
,
Levert Theo
,
Bernard Pelissier
,
Infante Ingrid C.
et al.
Journées de la matière condensée (JMC17) , Société française de physique (SFP), Aug 2021, Rennes, France
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hal-03375553v1
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Impact of Wet Treatments on the Electrical Performance of Ge 0.9 Sn 0.1 -Based p-MOS Capacitors
Mohamed Aymen Mahjoub
,
Thibault Haffner
,
Sébastien Labau
,
Etienne Eustache
,
Joris Aubin
et al.
Journal articles
hal-02051071v1
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XPS analysis of metal/oxide stack and correlation between binding energy shift and electrical properties
Charly Fontaine
,
Bernard Pelissier
,
Mickael Gros-Jean
,
Thierry Chevolleau
ECASIA 2017 , Sep 2017, Montpellier, France
Conference poster
hal-01960786v1
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First Experimental Functionalization Results of SiC Nanopillars for Biosensing Applications
Louis Fradetal
,
Valérie Stambouli
,
Edwige Bano
,
Bernard Pelissier
,
Katarzyna Wierzbowska
et al.
Materials Science Forum , 2013, 740-742, pp.821-824
Journal articles
hal-02006461v1
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Quasi insitu XPS characterization applied to PEALD selective deposition of TiO2 The IMPACT 300mm project and platform: merging academic research and industrial applications in microelectronic
Bernard Pelissier
30th World nanoconference , May 2019, Zurich, Switzerland
Conference papers
hal-02331961v1
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Développement de capteurs environnementaux ultra-basse consommation à base de SnO2
Antonio Assaf
,
Bernard Pelissier
,
Theo Levert
,
Ingrid Cañero Infante
,
Bassem Salem
et al.
4th international workshop of IEEE Sensors , Nov 2021, Marseille, France
Conference papers
hal-03503960v1
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Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films
Joao Resende
,
David Fuard
,
Delphine Le Cunff
,
Jean-Herve Tortai
,
Bernard Pelissier
et al.
Journal articles
hal-03017737v1
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