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Validity of the Diffused Aerial Image Model: an Assessment Based on Multiple Test Cases
David Fuard
,
Maxime Besacier
,
Patrick Schiavone
Conference papers
hal-00022155v1
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EUV Lithography simulation with rigorous mask computation and simplified resist models
Amandine Jouve
,
Vincent Farys
,
David Fuard
,
Patrick Schiavone
,
Patrick Naulleau
et al.
MNE05 Conference, 2005, Vienna, Austria
Conference papers
hal-00023202v1
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Using scatterometry for 3D-feature metrology: application to Nano-Imprint Lithography
Rafik Smaali
,
David Fuard
,
Corinne Perret
,
Patrick Schiavone
Nanoprint Nanoimprint Technology 05 Conference, 2005, Nara, Japan
Conference papers
hal-00023229v1
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3D simulation using Modal Method by Fourier Expansion: application to EUV lithography and scatterometry
Patrick Schiavone
,
Rafik Smaali
,
David Fuard
,
Maxime Besacier
Fraunhofer IISB Lithography Simulation Workshop, 2005, Pommersfelden, Germany
Conference papers
hal-00023230v1
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Mathematical Modelling of Fibroblast shape Transition on Arrays of Adhesive Micropatterns with Varying Pitch
Angélique Stéphanou
,
Tzvetelina Tzvetkova-Chevolleau
,
David Fuard
,
Philippe Tracqui
,
Patrick Schiavone
et al.
ECMTB08; European Conference on Mathematical and Theoretical Biology, Jun 2008, Edinburgh, United Kingdom
Conference papers
hal-00340399v1
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Comparison of various lithography strategies for the 65- and 45-nm half pitch using simulation
David Fuard
,
Patrick Schiavone
2004, pp.1360-1374
Conference papers
hal-00022158v1
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Control of cell morphodynamic and displacement orientation by precise tuning between substrate nanopatterning and rigidity
Tzvetelina Tzvetkova-Chevolleau
,
David Fuard
,
Patrick Schiavone
,
Sébastien Decossas
,
Angélique Stéphanou
et al.
Nanobio Europe 2008, Jun 2008, Barcelona, Spain
Conference papers
hal-00340397v1
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Investigation of lengthscales in cell rigidity sensing,
Abbas Mgharbel
,
Camille Migdal
,
Nicolas Bouchonville
,
Paul Dupenloup
,
David Fuard
et al.
Mechanobiology and Physics of Life, Jun 2022, Lyon, France
Conference poster
hal-03778131v1
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Reply to the ‘Comment on “Intracellular stresses in patterned cell assemblies”’ by D. Tambe et al., Soft Matter, 2014, 10 DOI: 10.1039/C4SM00597J
Michel Moussus
,
Christelle C. Der Loughian
,
David Fuard
,
Marie Courçon
,
Danielle Gulino Debrac
et al.
Journal articles
hal-01869172v1
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The Motility of Normal and Cancer Cells in Response to the Combined Influence of Substrate Rigidity and Anisotropic Nanostructure
Tzvetelina Tzvetkova-Chevolleau
,
Angélique Stephanou
,
David Fuard
,
Jacques Ohayon
,
Patrick Schiavone
et al.
ICBME2008, 13th International Conference on Biomedical Engineering, 2008, Singapore, Singapore
Conference papers
hal-00374519v1
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The motility of normal and cancer cells in response to the combined influence of substrate rigidity and anisotropic microstructure
Tzvetelina Tzvetkova-Chevolleau
,
Angélique Stéphanou
,
David Fuard
,
Jacques Ohayon
,
Patrick Schiavone
et al.
Journal articles
hal-00291559v1
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Etude et caractérisation avancées des procédés plasma pour les technologies sub - 0.1 µm
David Fuard
Micro et nanotechnologies/Microélectronique. Université d'Orléans, 2003. Français. ⟨NNT : ⟩
Theses
tel-00006610v1
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Plasma Damage of Porous Low-k Materials
Maxime Darnon
,
Thierry Chevolleau
,
Romain Hurand
,
David Fuard
,
Régis Bouyssou
et al.
Material Research Society Spring Meeting, Apr 2014, San Francisco, United States
Conference papers
hal-02338124v1
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Outliers detection by fuzzy classification method for model building
Mame Kouna Top
,
Yorick Trouiller
,
Vincent Farys
,
David Fuard
,
Emek Yesilada
et al.
Metrology, Inspection, and Process Control for Microlithography XXIII, Feb 2009, San Jose (CA), United States. in press, ⟨10.1117/12.812955⟩
Conference papers
hal-00374511v1
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OPC model error study through mask and SEM measurement error
Mame Kouna Top
,
David Fuard
,
Vincent Farys
,
Yorick Trouiller
,
Patrick Schiavone
et al.
Metrology, Inspection, and Process Control for Microlithography XXIV, Feb 2010, San Jose (CA), United States. in press
Conference papers
hal-00462229v1
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Poly- L -lysine/lminin surface coating reverses glial cell mechanosensitivity on stiffness-patterned hydrogels
Caterina Tomba
,
Camille Migdal
,
David Fuard
,
Catherine Villard
,
Alice Nicolas
et al.
Journal articles
hal-03640792v1
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Intracellular stresses in patterned cell assemblies
Michel Moussus
,
Christelle C. Der Loughian
,
David Fuard
,
Marie Courçon
,
Danielle Gulino-Debrac
et al.
Journal articles
hal-00949969v1
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Cells on Hydrogels with Micron-Scaled Stiffness Patterns Demonstrate Local Stiffness Sensing
Abbas Mgharbel
,
Camille Migdal
,
Nicolas Bouchonville
,
Paul Dupenloup
,
David Fuard
et al.
Journal articles
hal-03598510v1
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An inverse ellipsometric problem for thin film characterization: comparison of different optimization methods
Ayse Akbalik
,
Sébastien Soulan
,
Jean-Hervé Tortai
,
David Fuard
,
Issiaka Kone
et al.
Metrology, Inspection, and Process Control for Microlithography XXIII, Feb 2009, San Jose (CA), United States. in press, ⟨10.1117/12.814118⟩
Conference papers
hal-00374509v1
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Assessment of the critical dimension prediction accuracy for the lumped parameter model for resist lithography
David Fuard
,
Patrick Schiavone
Journal articles
hal-00021022v1
|
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Assessment of different simplified resist models
David Fuard
,
Maxime Besacier
,
Patrick Schiavone
2002, pp.1266-1277
Conference papers
hal-00022164v1
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Measurement of residual thickness using scatterometry
David Fuard
,
Corinne Perret
,
Vincent Farys
,
Cécile Gourgon
,
Patrick Schiavone
et al.
Journal articles
hal-00020910v1
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Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films
Joao Resende
,
David Fuard
,
Delphine Le Cunff
,
Jean-Herve Tortai
,
Bernard Pelissier
et al.
Journal articles
hal-03017737v1
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Micron-scaled Rigidity-patterned Hydrogels with Tunable Surface Coating to Study the Role of Chemistry in Cell Rigidity Sensing
Abbas Mgharbel
,
Camille Migdal
,
Nicolas Bouchonville
,
David Fuard
,
Alexandre Morel
et al.
Journées Nationales des Technologies Emergentes, Nov 2019, Grenoble, France
Conference poster
hal-02344364v1
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