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authFullName_s : David Fuard
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Validity of the Diffused Aerial Image Model: an Assessment Based on Multiple Test Cases

David Fuard , Maxime Besacier , Patrick Schiavone
2003, pp.1536-1543, ⟨10.1117/12.485516⟩
Conference papers hal-00022155v1

EUV Lithography simulation with rigorous mask computation and simplified resist models

Amandine Jouve , Vincent Farys , David Fuard , Patrick Schiavone , Patrick Naulleau et al.
MNE05 Conference, 2005, Vienna, Austria
Conference papers hal-00023202v1

Using scatterometry for 3D-feature metrology: application to Nano-Imprint Lithography

Rafik Smaali , David Fuard , Corinne Perret , Patrick Schiavone
Nanoprint Nanoimprint Technology 05 Conference, 2005, Nara, Japan
Conference papers hal-00023229v1

3D simulation using Modal Method by Fourier Expansion: application to EUV lithography and scatterometry

Patrick Schiavone , Rafik Smaali , David Fuard , Maxime Besacier
Fraunhofer IISB Lithography Simulation Workshop, 2005, Pommersfelden, Germany
Conference papers hal-00023230v1

Mathematical Modelling of Fibroblast shape Transition on Arrays of Adhesive Micropatterns with Varying Pitch

Angélique Stéphanou , Tzvetelina Tzvetkova-Chevolleau , David Fuard , Philippe Tracqui , Patrick Schiavone et al.
ECMTB08; European Conference on Mathematical and Theoretical Biology, Jun 2008, Edinburgh, United Kingdom
Conference papers hal-00340399v1
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Comparison of various lithography strategies for the 65- and 45-nm half pitch using simulation

David Fuard , Patrick Schiavone
2004, pp.1360-1374
Conference papers hal-00022158v1

Control of cell morphodynamic and displacement orientation by precise tuning between substrate nanopatterning and rigidity

Tzvetelina Tzvetkova-Chevolleau , David Fuard , Patrick Schiavone , Sébastien Decossas , Angélique Stéphanou et al.
Nanobio Europe 2008, Jun 2008, Barcelona, Spain
Conference papers hal-00340397v1

Investigation of lengthscales in cell rigidity sensing,

Abbas Mgharbel , Camille Migdal , Nicolas Bouchonville , Paul Dupenloup , David Fuard et al.
Mechanobiology and Physics of Life, Jun 2022, Lyon, France
Conference poster hal-03778131v1
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Reply to the ‘Comment on “Intracellular stresses in patterned cell assemblies”’ by D. Tambe et al., Soft Matter, 2014, 10 DOI: 10.1039/C4SM00597J

Michel Moussus , Christelle C. Der Loughian , David Fuard , Marie Courçon , Danielle Gulino Debrac et al.
Soft Matter, 2014, 10 (39), pp.7683-7684. ⟨10.1039/C4SM01066C⟩
Journal articles hal-01869172v1

The Motility of Normal and Cancer Cells in Response to the Combined Influence of Substrate Rigidity and Anisotropic Nanostructure

Tzvetelina Tzvetkova-Chevolleau , Angélique Stephanou , David Fuard , Jacques Ohayon , Patrick Schiavone et al.
ICBME2008, 13th International Conference on Biomedical Engineering, 2008, Singapore, Singapore
Conference papers hal-00374519v1
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The motility of normal and cancer cells in response to the combined influence of substrate rigidity and anisotropic microstructure

Tzvetelina Tzvetkova-Chevolleau , Angélique Stéphanou , David Fuard , Jacques Ohayon , Patrick Schiavone et al.
Biomaterials, 2008, 29 (10), pp.1541--1551. ⟨10.1016/j.biomaterials.2007.12.016⟩
Journal articles hal-00291559v1
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Etude et caractérisation avancées des procédés plasma pour les technologies sub - 0.1 µm

David Fuard
Micro et nanotechnologies/Microélectronique. Université d'Orléans, 2003. Français. ⟨NNT : ⟩
Theses tel-00006610v1

Plasma Damage of Porous Low-k Materials

Maxime Darnon , Thierry Chevolleau , Romain Hurand , David Fuard , Régis Bouyssou et al.
Material Research Society Spring Meeting, Apr 2014, San Francisco, United States
Conference papers hal-02338124v1
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Outliers detection by fuzzy classification method for model building

Mame Kouna Top , Yorick Trouiller , Vincent Farys , David Fuard , Emek Yesilada et al.
Metrology, Inspection, and Process Control for Microlithography XXIII, Feb 2009, San Jose (CA), United States. in press, ⟨10.1117/12.812955⟩
Conference papers hal-00374511v1
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OPC model error study through mask and SEM measurement error

Mame Kouna Top , David Fuard , Vincent Farys , Yorick Trouiller , Patrick Schiavone et al.
Metrology, Inspection, and Process Control for Microlithography XXIV, Feb 2010, San Jose (CA), United States. in press
Conference papers hal-00462229v1
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Poly- L -lysine/lminin surface coating reverses glial cell mechanosensitivity on stiffness-patterned hydrogels

Caterina Tomba , Camille Migdal , David Fuard , Catherine Villard , Alice Nicolas et al.
ACS Applied Bio Materials, 2022, 5 (4), pp.1552-1563. ⟨10.1021/acsabm.1c01295⟩
Journal articles hal-03640792v1
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Intracellular stresses in patterned cell assemblies

Michel Moussus , Christelle C. Der Loughian , David Fuard , Marie Courçon , Danielle Gulino-Debrac et al.
Soft Matter, 2013, 10, pp.2414-2423. ⟨10.1039/C3SM52318G⟩
Journal articles hal-00949969v1
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Cells on Hydrogels with Micron-Scaled Stiffness Patterns Demonstrate Local Stiffness Sensing

Abbas Mgharbel , Camille Migdal , Nicolas Bouchonville , Paul Dupenloup , David Fuard et al.
Nanomaterials, 2022, 12 (4), pp.648. ⟨10.3390/nano12040648⟩
Journal articles hal-03598510v1
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An inverse ellipsometric problem for thin film characterization: comparison of different optimization methods

Ayse Akbalik , Sébastien Soulan , Jean-Hervé Tortai , David Fuard , Issiaka Kone et al.
Metrology, Inspection, and Process Control for Microlithography XXIII, Feb 2009, San Jose (CA), United States. in press, ⟨10.1117/12.814118⟩
Conference papers hal-00374509v1
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Assessment of the critical dimension prediction accuracy for the lumped parameter model for resist lithography

David Fuard , Patrick Schiavone
Microelectronic Engineering, 2004, 73-74, pp.53-58. ⟨10.1016/j.mee.2004.02.015⟩
Journal articles hal-00021022v1
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Assessment of different simplified resist models

David Fuard , Maxime Besacier , Patrick Schiavone
2002, pp.1266-1277
Conference papers hal-00022164v1
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Measurement of residual thickness using scatterometry

David Fuard , Corinne Perret , Vincent Farys , Cécile Gourgon , Patrick Schiavone et al.
Journal of Vacuum Science and Technology, 2005, 23 (6), pp.3069-3074. ⟨10.1116/1.2130345⟩
Journal articles hal-00020910v1
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Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

Joao Resende , David Fuard , Delphine Le Cunff , Jean-Herve Tortai , Bernard Pelissier et al.
Materials Chemistry and Physics, 2020, 259, pp.124000. ⟨10.1016/j.matchemphys.2020.124000⟩
Journal articles hal-03017737v1

Micron-scaled Rigidity-patterned Hydrogels with Tunable Surface Coating to Study the Role of Chemistry in Cell Rigidity Sensing

Abbas Mgharbel , Camille Migdal , Nicolas Bouchonville , David Fuard , Alexandre Morel et al.
Journées Nationales des Technologies Emergentes, Nov 2019, Grenoble, France
Conference poster hal-02344364v1