Detection and correlation of yield loss induced by color resist deposition deviation with a deep learning approach applied to optical acquisitions
Thomas Alcaire
,
Delphine Le Cunff
,
Jean-Hervé Tortai
,
Sebastien Soulan
,
Victor Gredy
et al.
Conference papers
hal-03368015v1
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Hybridization of ellipsometry and XPS energy loss: robust band gap and broadband optical constants determination of thin films
Théo Levert
,
Jon De Vecchy
,
Julien Duval
,
Stéphan Verdier
,
Delphine Le Cunff
et al.
Journées Nationales des Spectroscopies de PhotoEmission , May 2022, Dijon, France
Conference papers
hal-03777894v1
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Analysis and modelling of patterned wafer nano-topography using multiple linear regression on design GDS and silicon PWG data
Mehdi Kessar
,
Bertrand Le-Gratiet
,
Pierre Lemaire
,
Virginie Brouzet
,
Delphine Le Cunff
et al.
Metrology, Inspection, and Process Control for Microlithography XXXIII , Feb 2019, San Jose, France. pp.97,
⟨10.1117/12.2512398⟩
Conference papers
hal-03331721v1
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Dark-field electron holography as a recording of crystal diffraction in real space: a comparative study with high-resolution X-ray diffraction for strain analysis of MOSFETs
Victor Boureau
,
Aurèle Durand
,
Patrice Gergaud
,
Delphine Le Cunff
,
Matthew Wormington
et al.
Journal articles
hal-03001931v1
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Raman spectroscopy and ellipsometry hybridization: application to GeSbTe crystallization measurement for in line control
Jon De Vecchy
,
Jean-Herve Tortai
,
Jérémy Moeyaert
,
Yannick Le Friec
,
Delphine Le Cunff
et al.
ECASIA 2022 , May 2022, Limerick, Ireland
Conference papers
hal-03777907v1
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Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures
Hoang-Lam Pham
,
Thomas Alcaire
,
Sebastien Soulan
,
Delphine Le Cunff
,
Jean-Hervé Tortai
et al.
Journal articles
hal-03845560v1
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Photoluminescence Imaging for Buried Defects Detection in Silicon: Assessment and Use-Cases
Romain Duru
,
Delphine Le Cunff
,
Maxime Cannac
,
Isabella Mica
,
Jose Baruchel
et al.
Journal articles
hal-03777898v1
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Spectroscopic Ellipsometry Imaging for Process Deviation Detection via Machine Learning Approach
Thomas Alcaire
,
Delphine Le Cunff
,
Victor Gredy
,
Jean-Herve Tortai
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) , Aug 2020, Saratoga Springs, United States. pp.1-6,
⟨10.1109/ASMC49169.2020.9185349⟩
Conference papers
hal-03017738v1
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Full Wafer Process Control Through Object Detection Using Region-Based Convolutional Neural Networks
Thomas Alcaire
,
Delphine Le Cunff
,
Jean-Herve Tortai
,
Sebastien Soulan
,
Virginie Brouzet
et al.
Conference papers
hal-03746567v1
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Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films
Joao Resende
,
David Fuard
,
Delphine Le Cunff
,
Jean-Herve Tortai
,
Bernard Pelissier
et al.
Journal articles
hal-03017737v1
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