Search - Archive ouverte HAL Access content directly

Filter your results

10 Results
authFullName_s : Delphine Le Cunff

Detection and correlation of yield loss induced by color resist deposition deviation with a deep learning approach applied to optical acquisitions

Thomas Alcaire , Delphine Le Cunff , Jean-Hervé Tortai , Sebastien Soulan , Victor Gredy et al.
SPIE Advanced Lithography, Feb 2021, Online Only, France. pp.79, ⟨10.1117/12.2582058⟩
Conference papers hal-03368015v1

Hybridization of ellipsometry and XPS energy loss: robust band gap and broadband optical constants determination of thin films

Théo Levert , Jon De Vecchy , Julien Duval , Stéphan Verdier , Delphine Le Cunff et al.
Journées Nationales des Spectroscopies de PhotoEmission, May 2022, Dijon, France
Conference papers hal-03777894v1

Analysis and modelling of patterned wafer nano-topography using multiple linear regression on design GDS and silicon PWG data

Mehdi Kessar , Bertrand Le-Gratiet , Pierre Lemaire , Virginie Brouzet , Delphine Le Cunff et al.
Metrology, Inspection, and Process Control for Microlithography XXXIII, Feb 2019, San Jose, France. pp.97, ⟨10.1117/12.2512398⟩
Conference papers hal-03331721v1
Image document

Dark-field electron holography as a recording of crystal diffraction in real space: a comparative study with high-resolution X-ray diffraction for strain analysis of MOSFETs

Victor Boureau , Aurèle Durand , Patrice Gergaud , Delphine Le Cunff , Matthew Wormington et al.
Journal of Applied Crystallography, 2020, 53 (4), pp.885-895. ⟨10.1107/S1600576720006020⟩
Journal articles hal-03001931v1

Raman spectroscopy and ellipsometry hybridization: application to GeSbTe crystallization measurement for in line control

Jon De Vecchy , Jean-Herve Tortai , Jérémy Moeyaert , Yannick Le Friec , Delphine Le Cunff et al.
ECASIA 2022, May 2022, Limerick, Ireland
Conference papers hal-03777907v1
Image document

Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures

Hoang-Lam Pham , Thomas Alcaire , Sebastien Soulan , Delphine Le Cunff , Jean-Hervé Tortai et al.
Nanomaterials, 2022, 12 (22), pp.3951. ⟨10.3390/nano12223951⟩
Journal articles hal-03845560v1

Photoluminescence Imaging for Buried Defects Detection in Silicon: Assessment and Use-Cases

Romain Duru , Delphine Le Cunff , Maxime Cannac , Isabella Mica , Jose Baruchel et al.
IEEE Transactions on Semiconductor Manufacturing, 2019, 32 (1), pp.23-30. ⟨10.1109/TSM.2018.2871967⟩
Journal articles hal-03777898v1
Image document

Spectroscopic Ellipsometry Imaging for Process Deviation Detection via Machine Learning Approach

Thomas Alcaire , Delphine Le Cunff , Victor Gredy , Jean-Herve Tortai
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Aug 2020, Saratoga Springs, United States. pp.1-6, ⟨10.1109/ASMC49169.2020.9185349⟩
Conference papers hal-03017738v1
Image document

Full Wafer Process Control Through Object Detection Using Region-Based Convolutional Neural Networks

Thomas Alcaire , Delphine Le Cunff , Jean-Herve Tortai , Sebastien Soulan , Virginie Brouzet et al.
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2022, Saratoga Springs, France. pp.1-5, ⟨10.1109/ASMC54647.2022.9792479⟩
Conference papers hal-03746567v1
Image document

Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

Joao Resende , David Fuard , Delphine Le Cunff , Jean-Herve Tortai , Bernard Pelissier et al.
Materials Chemistry and Physics, 2020, 259, pp.124000. ⟨10.1016/j.matchemphys.2020.124000⟩
Journal articles hal-03017737v1