Wafer-scale HfO2 encapsulated silicon nanowire field effect transistor for efficient label-free DNA hybridization detection in dry environment
Ganesh Jayakumar
,
Maxime Legallais
,
Per-Erik Hellstrom
,
Mireille Mouis
,
Isabelle Pignot-Paintrand
et al.
Journal articles
hal-02012585v1
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Reliability of HfO2 metal-insulator-metal capacitors under AC stress
M. Kassmi
,
F. Jomni
,
P. Gonon
,
O. Khaldi
,
L. Latu-Romain
et al.
Journal articles
hal-01332701v1
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Analysis and detection of an incorrect profile shape in a classical scatterometric process
Zaki Sabit Fawzi Philippe
,
Stéphane Robert
,
I. El Kalyoubi
,
Bernard Bayard
Journal articles
istex
ujm-01478244v1
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Cold plasma for Atomic Layer Processing: from ALD and ALE to Area Selective Deposition
Christophe Vallée
International workshop on nanoparticles and nanostructures synthesized by plasmas for energy applications (XXXIV ICPIG) (ICRP-10) , Jul 2019, Sapporo, Japan
Conference papers
hal-02338883v1
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Strongly Directional Scattering from Dielectric Nanowires
Peter Wiecha
,
Aurelien Cuche
,
Arnaud Arbouet
,
Christian Girard
,
Gérard Colas Des Francs
et al.
Journal articles
hal-01730478v1
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In vivo actin dynamics during C. elegans embryonic morphogenesis
Sara Bouizakarne
,
Jocelyn Etienne
,
Alice Nicolas
,
Grégoire Michaux
Biophysical Society Thematic meeting , Oct 2019, Aussois, France
Conference poster
hal-02916175v1
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Electrochemical Study of a SOFC with Various H 2 -CO-CH 4 -CO 2 -N 2 Gaseous Mixtures
A. Le Gal La Salle
,
F. Ricoul
,
O. Joubert
,
A. Kerihuel
,
Albert Subrenat
et al.
Journal articles
hal-01623554v1
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Assessment of gender-related differences in management of stroke: evaluation of clinical practices in a French registry
L. Fraticelli
,
Julie Freyssenge
,
P. Serre
,
L. Derex
,
C. El Khoury
et al.
Conference poster
hal-02705306v1
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Core-Shell Percolative Nanodielectric for High Voltage Integrated Capacitors
M Alfonso
,
B Viala
,
J.-H Tortai
Journées nationales sur les technologies émergentes en micro-nano fabrication, (JNTE2019) , Nov 2019, Grenoble, France
Conference papers
hal-03266508v1
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Profile control and sidewall modifications of narrow porous ULK trenches after plasma etching and pore sealing treatments
Maxime Darnon
,
Thierry Chevolleau
,
D. Eon
,
Fanny Bailly
,
Bernard Pélissier
et al.
53rd International AVS Symposium , 2006, San Francisco, United States
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hal-00400479v1
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Hybrid-RRAM towards next generation of non-volatile memory: Coupling of oxygen vacancies and metal ions
Gilbert Sassine
,
Cecile Nail
,
Philippe Blaise
,
Benoit Sklenard
,
Mathieu Bernard
et al.
Journal articles
cea-02885888v1
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Mechanical thrombectomy with the ERIC retrieval device: initial experience
Hélène Raoult
,
Hocine Redjem
,
Romain Bourcier
,
Alina Gaultier-Lintia
,
Benjamin Daumas-Duport
et al.
Journal articles
hal-01377990v1
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Low damage patterning of In 0.53 Ga 0.47 As film for its integration as n-channel in a fin metal oxide semiconductor field effect transistor architecture
Maxime Bizouerne
,
Erwine Pargon
,
Camille Petit-Etienne
,
Sébastien Labau
,
Sylvain David
et al.
Journal articles
hal-02145945v1
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Développement de gravures ultra sélectives de matériaux diélectriques par plasma déporté, pour des applications dans la micro-électronique
Emilie Prevost
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2019. Français.
⟨NNT : 2019GREAT102⟩
Theses
tel-02893134v1
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Characterization and Development of High Dose Implanted Resist Stripping Processes
Marion Croisy
,
Cécile Jenny
,
Claire Richard
,
Denis Guiheux
,
Alain Campo
et al.
Conference papers
hal-01882454v1
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New route for selective etching in remote plasma source: Application to the fabrication of horizontal stacked Si nanowires for gate all around devices
Erwine Pargon
,
Camille Petit-Etienne
,
Laurène Youssef
,
Gaspard Thomachot
,
Sylvain David
et al.
Journal articles
hal-02145902v1
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LiNbO3 Films for Acoustic Wave Applications
A. Bartasyte
,
S. Oliveri
,
T. Baron
,
T. Salut
,
S. Margueron
et al.
IEEE International Ultrasonics Symposium , 2016, Tours, France
Conference papers
hal-01489067v1
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Molecular Diodes for Optical Rectennas
David Duche
,
Ujwol Palanchoke
,
Luigi Terracciano
,
Florian-Xuan Dang
,
Lionel Patrone
et al.
Conference papers
hal-01435130v1
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Etch process cleaning to improve wafer to wafer reproducibility
T. Chevolleau
,
C. Petit-Etienne
,
Gilles Cunge
,
Erwine Pargon
,
L. Vallier
et al.
ENRIS 2019 (European Nanofabrication Research Infrastructure Symposium) , 2019, UNIVERSITY OF TWENTE, Netherlands
Conference papers
hal-02624143v1
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Letter to the Editor: About bovine beta-casofensin genetic variants-A comment on Bruno et al. (2017) Response
Pascale Plaisancié
,
J. Bruno
,
Aurélie Nicolas
,
Sandra Pesenti
,
J. Schwarz
et al.
Journal articles
hal-02003829v1
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Sol-Gel Direct Photolithography - Principle and Applications
David Riassetto
,
Céline Ternon
,
Michel Langlet
BIT’s 6th Annual World Congress of Nano Science & Technology , Oct 2016, Singapour, Singapore
Conference papers
hal-02016942v1
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De l’élaboration de nanonets de silicium par voie liquide à la fabrication de transistors à effet de champ
Maxime Legallais
,
P. Serre
,
Bassem Salem
,
T. Baron
,
V. Stambouli
et al.
12ème Journée Sol-Gel et Chimie Liquide Rhône-Alpes-Auvergne (JSGRAA12) , G. Chadeyron, A. Potdevin, D. Boyer, F. Vocanson et M. Langlet, Mar 2016, Saint-Etienne, France
Conference papers
hal-02016948v1
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Piégeage et caractérisation de bactéries par cristaux photoniques
Manon Tardif
Theses
tel-02052814v1
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New semiconductive nanostructures for electrical biosensing
Maxime Legallais
,
Thomas Demes
,
Romain Bange
,
Céline Ternon
,
Edwige Bano
et al.
Journée Thématique Minalogic : Technologies du numérique pour la médecine personnalisée , Nov 2016, La Tronche, France
Conference papers
hal-02049764v1
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Cleaning graphene: A first quantum/classical molecular dynamics approach
L. Delfour
,
A. Davydova
,
E. Despiau-Pujo
,
G. Cunge
,
D. Graves
et al.
Journal articles
hal-01881977v1
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Effet de recuits thermiques sur des diélectriques à faible permittivité pour des applications Back-End-of-Line intermédiaire en vue d'une intégration 3D séquentielle
Sylvain Beaurepaire
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2019. Français.
⟨NNT : 2019GREAT085⟩
Theses
tel-02634361v1
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Topographically selective deposition
A. Chaker
,
C. Vallee
,
V. Pesce
,
S. Belahcen
,
R. Vallat
et al.
Applied Physics Letters , 2019, 114 (4), pp.043101
Journal articles
hal-01997456v1
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SIMS depth profiling and topography studies of repetitive III–V trenches under low energy oxygen ion beam sputtering
Viktoriia Gorbenko
,
Franck Bassani
,
Alexandre Merkulov
,
Thierry Baron
,
Mickaël Martin
et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics , 2016, 34 (3), pp.03H131.
⟨10.1116/1.4944632⟩
Journal articles
hal-01881953v1
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Phagogramme Optique : L’imagerie sans lentille comme outil de diagnostic pour la phagothérapie
P. Perlemoine
,
E. Picard
,
E. Hadji
,
M. Zelsmann
,
A. Maire
et al.
39ème Réunion Interdisciplinaire de Chimiothérapie Anti-Infectieuse– RICAI 2019 , Dec 2019, Paris, France
Conference poster
hal-02916181v1
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Optical trapping and Gram type differentiation of living bacteria with 2D photonic crystal cavities
Rita Therisod
,
Manon Tardif
,
Emmanuel Picard
,
Pierre R. Marcoux
,
Victor Gaude
et al.
Conference papers
hal-01930094v1
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