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Structure: Internal structure identifier : 1041825
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Wafer-scale HfO2 encapsulated silicon nanowire field effect transistor for efficient label-free DNA hybridization detection in dry environment

Ganesh Jayakumar , Maxime Legallais , Per-Erik Hellstrom , Mireille Mouis , Isabelle Pignot-Paintrand et al.
Nanotechnology, 2019, 30, pp.184002+12. ⟨10.1088/1361-6528/aaffa5⟩
Journal articles hal-02012585v1

Reliability of HfO2 metal-insulator-metal capacitors under AC stress

M. Kassmi , F. Jomni , P. Gonon , O. Khaldi , L. Latu-Romain et al.
Journal of Physics D: Applied Physics, 2016, 49 (16), pp.165502. ⟨10.1088/0022-3727/49/16/165502⟩
Journal articles hal-01332701v1

Analysis and detection of an incorrect profile shape in a classical scatterometric process

Zaki Sabit Fawzi Philippe , Stéphane Robert , I. El Kalyoubi , Bernard Bayard
European Physical Journal: Applied Physics, 2016, 76 (3), ⟨10.1051/epjap/2016160157⟩
Journal articles istex ujm-01478244v1

Cold plasma for Atomic Layer Processing: from ALD and ALE to Area Selective Deposition

Christophe Vallée
International workshop on nanoparticles and nanostructures synthesized by plasmas for energy applications (XXXIV ICPIG) (ICRP-10), Jul 2019, Sapporo, Japan
Conference papers hal-02338883v1
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Strongly Directional Scattering from Dielectric Nanowires

Peter Wiecha , Aurelien Cuche , Arnaud Arbouet , Christian Girard , Gérard Colas Des Francs et al.
ACS photonics, 2017, 4 (8), pp.2036 - 2046. ⟨10.1021/acsphotonics.7b00423⟩
Journal articles hal-01730478v1

In vivo actin dynamics during C. elegans embryonic morphogenesis

Sara Bouizakarne , Jocelyn Etienne , Alice Nicolas , Grégoire Michaux
Biophysical Society Thematic meeting, Oct 2019, Aussois, France
Conference poster hal-02916175v1

Electrochemical Study of a SOFC with Various H 2 -CO-CH 4 -CO 2 -N 2 Gaseous Mixtures

A. Le Gal La Salle , F. Ricoul , O. Joubert , A. Kerihuel , Albert Subrenat et al.
Fuel Cells, 2017, 17 (2), pp.144 - 150. ⟨10.1002/fuce.201500211⟩
Journal articles hal-01623554v1

Assessment of gender-related differences in management of stroke: evaluation of clinical practices in a French registry

L. Fraticelli , Julie Freyssenge , P. Serre , L. Derex , C. El Khoury et al.
European Congress of Epidemiology, Jul 2018, Lyon, France. 66, pp.S411, 2018, ⟨10.1016/j.respe.2018.05.478⟩
Conference poster hal-02705306v1
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Core-Shell Percolative Nanodielectric for High Voltage Integrated Capacitors

M Alfonso , B Viala , J.-H Tortai
Journées nationales sur les technologies émergentes en micro-nano fabrication, (JNTE2019), Nov 2019, Grenoble, France
Conference papers hal-03266508v1

Profile control and sidewall modifications of narrow porous ULK trenches after plasma etching and pore sealing treatments

Maxime Darnon , Thierry Chevolleau , D. Eon , Fanny Bailly , Bernard Pélissier et al.
53rd International AVS Symposium, 2006, San Francisco, United States
Conference papers hal-00400479v1
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Hybrid-RRAM towards next generation of non-volatile memory: Coupling of oxygen vacancies and metal ions

Gilbert Sassine , Cecile Nail , Philippe Blaise , Benoit Sklenard , Mathieu Bernard et al.
Advanced Electronic Materials, 2018, 5 (2), pp.1800658. ⟨10.1002/aelm.201800658⟩
Journal articles cea-02885888v1

Mechanical thrombectomy with the ERIC retrieval device: initial experience

Hélène Raoult , Hocine Redjem , Romain Bourcier , Alina Gaultier-Lintia , Benjamin Daumas-Duport et al.
Journal of Neurointerventional Surgery, 2016, 9 (6), pp.574 - 577. ⟨10.1136/neurintsurg-2016-012379⟩
Journal articles hal-01377990v1
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Low damage patterning of In 0.53 Ga 0.47 As film for its integration as n-channel in a fin metal oxide semiconductor field effect transistor architecture

Maxime Bizouerne , Erwine Pargon , Camille Petit-Etienne , Sébastien Labau , Sylvain David et al.
Journal of Vacuum Science & Technology A, 2018, 36 (6), pp.061305. ⟨10.1116/1.5051505⟩
Journal articles hal-02145945v1
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Développement de gravures ultra sélectives de matériaux diélectriques par plasma déporté, pour des applications dans la micro-électronique

Emilie Prevost
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2019. Français. ⟨NNT : 2019GREAT102⟩
Theses tel-02893134v1
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Characterization and Development of High Dose Implanted Resist Stripping Processes

Marion Croisy , Cécile Jenny , Claire Richard , Denis Guiheux , Alain Campo et al.
9th International Workshop on Plasma Etch and Strip in Microelectronics (PESM) 2019, May 2016, Grenoble, France. ⟨10.4028/www.scientific.net/SSP.255.111⟩
Conference papers hal-01882454v1

New route for selective etching in remote plasma source: Application to the fabrication of horizontal stacked Si nanowires for gate all around devices

Erwine Pargon , Camille Petit-Etienne , Laurène Youssef , Gaspard Thomachot , Sylvain David et al.
Journal of Vacuum Science & Technology A, 2019, 37 (4), pp.040601. ⟨10.1116/1.5100087⟩
Journal articles hal-02145902v1

LiNbO3 Films for Acoustic Wave Applications

A. Bartasyte , S. Oliveri , T. Baron , T. Salut , S. Margueron et al.
IEEE International Ultrasonics Symposium, 2016, Tours, France
Conference papers hal-01489067v1

Molecular Diodes for Optical Rectennas

David Duche , Ujwol Palanchoke , Luigi Terracciano , Florian-Xuan Dang , Lionel Patrone et al.
NANOSTRUCTURED THIN FILMS IX, 2016, Unknown, Unknown Region. ⟨10.1117/12.2237734⟩
Conference papers hal-01435130v1

Etch process cleaning to improve wafer to wafer reproducibility

T. Chevolleau , C. Petit-Etienne , Gilles Cunge , Erwine Pargon , L. Vallier et al.
ENRIS 2019 (European Nanofabrication Research Infrastructure Symposium), 2019, UNIVERSITY OF TWENTE, Netherlands
Conference papers hal-02624143v1

Letter to the Editor: About bovine beta-casofensin genetic variants-A comment on Bruno et al. (2017) Response

Pascale Plaisancié , J. Bruno , Aurélie Nicolas , Sandra Pesenti , J. Schwarz et al.
Journal of Dairy Science, 2018, 101 (6), pp.4706-4706. ⟨10.3168/jds.2018-14426⟩
Journal articles hal-02003829v1

Sol-Gel Direct Photolithography - Principle and Applications

David Riassetto , Céline Ternon , Michel Langlet
BIT’s 6th Annual World Congress of Nano Science & Technology, Oct 2016, Singapour, Singapore
Conference papers hal-02016942v1

De l’élaboration de nanonets de silicium par voie liquide à la fabrication de transistors à effet de champ

Maxime Legallais , P. Serre , Bassem Salem , T. Baron , V. Stambouli et al.
12ème Journée Sol-Gel et Chimie Liquide Rhône-Alpes-Auvergne (JSGRAA12), G. Chadeyron, A. Potdevin, D. Boyer, F. Vocanson et M. Langlet, Mar 2016, Saint-Etienne, France
Conference papers hal-02016948v1
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Piégeage et caractérisation de bactéries par cristaux photoniques

Manon Tardif
Biophysique [physics.bio-ph]. Université Grenoble Alpes, 2018. Français. ⟨NNT : 2018GREAY054⟩
Theses tel-02052814v1

New semiconductive nanostructures for electrical biosensing

Maxime Legallais , Thomas Demes , Romain Bange , Céline Ternon , Edwige Bano et al.
Journée Thématique Minalogic : Technologies du numérique pour la médecine personnalisée, Nov 2016, La Tronche, France
Conference papers hal-02049764v1
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Cleaning graphene: A first quantum/classical molecular dynamics approach

L. Delfour , A. Davydova , E. Despiau-Pujo , G. Cunge , D. Graves et al.
Journal of Applied Physics, 2016, 119 (12), pp.125309. ⟨10.1063/1.4945034⟩
Journal articles hal-01881977v1
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Effet de recuits thermiques sur des diélectriques à faible permittivité pour des applications Back-End-of-Line intermédiaire en vue d'une intégration 3D séquentielle

Sylvain Beaurepaire
Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2019. Français. ⟨NNT : 2019GREAT085⟩
Theses tel-02634361v1

Topographically selective deposition

A. Chaker , C. Vallee , V. Pesce , S. Belahcen , R. Vallat et al.
Applied Physics Letters, 2019, 114 (4), pp.043101
Journal articles hal-01997456v1
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SIMS depth profiling and topography studies of repetitive III–V trenches under low energy oxygen ion beam sputtering

Viktoriia Gorbenko , Franck Bassani , Alexandre Merkulov , Thierry Baron , Mickaël Martin et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2016, 34 (3), pp.03H131. ⟨10.1116/1.4944632⟩
Journal articles hal-01881953v1

Phagogramme Optique : L’imagerie sans lentille comme outil de diagnostic pour la phagothérapie

P. Perlemoine , E. Picard , E. Hadji , M. Zelsmann , A. Maire et al.
39ème Réunion Interdisciplinaire de Chimiothérapie Anti-Infectieuse– RICAI 2019, Dec 2019, Paris, France
Conference poster hal-02916181v1

Optical trapping and Gram type differentiation of living bacteria with 2D photonic crystal cavities

Rita Therisod , Manon Tardif , Emmanuel Picard , Pierre R. Marcoux , Victor Gaude et al.
SPIE, 2017, San Diego, United States. ⟨10.1117/12.2319666⟩
Conference papers hal-01930094v1