Selective area epitaxy of in-plane HgTe nanostructures on CdTe(001) substrate - Institut d'électronique, de microélectronique et de nanotechnologie
Article Dans Une Revue Nanotechnology Année : 2024

Selective area epitaxy of in-plane HgTe nanostructures on CdTe(001) substrate

J Xu
  • Fonction : Auteur

Résumé

Semiconductor nanowires (NWs) are believed to play a crucial role for future applications in electronics, spintronics and quantum technologies. A potential candidate is HgTe but its sensitivity to nanofabrication processes restrain its development. A way to circumvent this obstacle is the selective area growth technique. Here, in-plane HgTe nanostructures are grown thanks to selective area molecular beam epitaxy on a semi-insulating CdTe substrate covered with a patterned SiO 2 mask. The shape of these nanostructures is defined by the in-plane orientation of the mask aperture along the <110>, <1 1 ¯ 0>, or <100> direction, the deposited thickness, and the growth temperature (GT). Several micron long in-plane NWs can be achieved as well as more complex nanostructures such as networks, diamond structures or rings. A good selectivity is achieved with very little parasitic growth on the mask even for a GT as low as 140 °C and growth rate up to 0.5 monolayer per second. For <110> oriented NWs, the center of the nanostructure exhibits a trapezoidal shape with {111}B facets and two grains on the sides, while <1 1 ¯ 0> oriented NWs show {111}A facets with adatoms accumulation on the sides of the top surface. Transmission electron microscopy observations reveal a continuous epitaxial relation between the CdTe substrate and the HgTe NW. Measurements of the resistance with four-point scanning tunneling microscopy indicates a good electrical homogeneity along the main NW axis and a thermally activated transport. This growth method paves the way toward the fabrication of complex HgTe-based nanostructures for electronic transport measurements.
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Dates et versions

hal-04746498 , version 1 (25-10-2024)

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N Chaize, X Baudry, P-H Jouneau, E Gautier, J-L Rouvière, et al.. Selective area epitaxy of in-plane HgTe nanostructures on CdTe(001) substrate. Nanotechnology, 2024, 35 (50), pp.505602. ⟨10.1088/1361-6528/ad7ff4⟩. ⟨hal-04746498⟩
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