Electrically-functionalised nanoindenter integrated in-situ in a Scanning Electron Microscope : case studies
Résumé
Fundamental understanding and quantitative characterization of electron transport mechanisms between two solids brought into mechanical contact require the development of a dedicated multifunctional device. In this article, we report original measurements and analyses based on a nanoindenter coupled with fine electrical measurements in-situ a Scanning Electron Microscope (SEM). After a description of the experimental set-up, we report quantitative results on resistive-nanoindentation performed on metallic systems with increasing complexity. Starting from a model case (Au single crystal, a noble metal), a procedure is developed, numerically modelled and further applied to a complex rheology structure (200 nm Au thin film plastically deformed against an elastic substrate) to demonstrate the quantitative monitoring of contact area. Then a two-phase AgPdCu alloy is used to illustrate the benefit of local characterisation performed under SEM imaging. The effect of interfacial layer (probably a native oxide film) on the electrical response is discussed. Finally, we present local impedance spectroscopy characterisation of a 10nm-thick alumina layer on aluminium substrate. The conductance through alumina during mechanical compression is discussed in terms of electrochemical processes.
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