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Journal Articles Physics of Plasmas Year : 2022

Qualification of uniform large area multidipolar ECR hydrogen plasma


The design and characterization of a multi-dipolar microwave electron cyclotron resonance (ECR) hydrogen plasma reactor are presented. In this configuration, 16 ECR sources are disposed uniformly along the azimuthal direction at a constant distance from the center of a cylindrical reactor. Several plasma diagnostics have been used to determine key parameters such as neutral species temperature; electron density and temperature; and H+, H2+, and H3+ ion energy distributions. The experimental characterization is supported by electromagnetic and magnetostatic field simulations as well as Particle In-Cell Monte Carlo Collisions simulations to analyze the observed ion energy distribution functions. Especially, we show that both electron density and temperature are spatially uniform, i.e., 1011 cm−3 and 3 eV, respectively. This plasma enables generating ion flux and energy in the ranges 1019–1022 ions m−2 s−1 and few keVs, respectively. The H2+ ion distribution function shows two populations which were attributed to surface effects. These features make this reactor particularly suitable for studying hydrogen plasma surface interaction under controlled conditions
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hal-03866173 , version 1 (22-11-2022)



L. Colina-Delacqua, M. Redolfi, Karim Ouaras, J. Naël-Redolfi, X. Bonnin, et al.. Qualification of uniform large area multidipolar ECR hydrogen plasma. Physics of Plasmas, 2022, 29 (4), pp.043508. ⟨10.1063/5.0083341⟩. ⟨hal-03866173⟩
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