Journal Articles
Materials Science in Semiconductor Processing
Year : 2022
Jean-François Michaud : Connect in order to contact the contributor
https://cnrs.hal.science/hal-03755512
Submitted on : Monday, August 22, 2022-9:08:12 AM
Last modification on : Thursday, August 24, 2023-3:42:36 PM
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Clément Berger, Daniel Alquier, Micka Bah, Jean-François Michaud. Electrical, morphological and structural properties of Ti ohmic contacts formed on n-type 4H–SiC by laser thermal annealing. Materials Science in Semiconductor Processing, 2022, 151, pp.106983. ⟨10.1016/j.mssp.2022.106983⟩. ⟨hal-03755512⟩
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