Ultra-Compact Fourier Transform Near-Infrared MEMS Spectral Sensor for Smart Industry and IoT
Résumé
Abstract Co-integration of nanomaterials into microdevices poses several technological challenges and presents numerous scientific opportunities that have been addressed in this paper by integrating zinc oxide nanowires (ZnO-NWs) into a microfluidic chamber. In addition to the applications of these combined materials, this work focuses on the study of the growth dynamics and uniformity of nanomaterials in a tiny microfluidic reactor environment. A unique experimental platform was built through the integration of a noninvasive optical characterization technique with the microfluidic reactor. This platform allowed the unprecedented demonstration of time-resolved and spatially resolved monitoring of the in situ growth of NWs, in which the chemicals were continuously fed into the microfluidic reactor. The platform was also used to assess the uniformity of NWs grown quickly in a 10-mm-wide microchamber, which was intentionally chosen to be 20 times wider than those used in previous attempts because it can accommodate applications requiring a large surface of interaction while still taking advantage of submillimeter height. Further observations included the effects of varying the flow rate on the NW diameter and length in addition to a synergetic effect of continuous renewal of the growth solution and the confined environment of the chemical reaction.