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Journal Articles Nano Express Year : 2024

Nanoscale dielectric properties of TiO2 in SiO2 nanocomposite deposited by hybrid PECVD method

Abstract

In this paper, nanocomposites (TiO 2 in SiO 2 ) are produced by an advanced hybrid aerosol-PECVD method based on direct liquid injection of a non-commercial colloidal solution in an O 2 / hexamethyldisiloxane (HMDSO) low-pressure plasma. Dielectric properties are investigated at nanoscale using techniques derived from Atomic Force Microcopy in terms of relative dielectric permittivity, charge injection and transport. Results show that a concentration in TiO 2 up to 14% by volume makes it possible to increase the relative dielectric permittivity up to 4.8 while maintaining the insulating properties of the silica matrix. For a TiO 2 concentration in the range 15%–37% by volume, the relative dielectric permittivity increases (up to 11 for 37% TiO 2 by volume) and only few agglomerated nanoparticles lowering the insulating properties are observed. For TiO 2 concentration above 40% by volume, the relative dielectric permittivity still increases but the quantity of agglomerated nanoparticles is very high, which greatly increases the charge transport dynamic and degrades the insulating properties. Finally, 37% of TiO 2 by volume in the SiO 2 matrix appears to be the best compromise, between high dielectric permittivity and low leakage current for the MIM applications aimed.
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hal-04549301 , version 1 (17-04-2024)

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C Villeneuve-Faure, Maria Mitronika, A P Dan, Laurent Boudou, William Ravisy, et al.. Nanoscale dielectric properties of TiO2 in SiO2 nanocomposite deposited by hybrid PECVD method. Nano Express, 2024, 5 (1), pp.015010. ⟨10.1088/2632-959x/ad220d⟩. ⟨hal-04549301⟩
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