Study of Pd/Y based multilayers with B4C barrier layers using high energy photoemission spectroscopy combined with x-ray standing waves - Laboratoire de Chimie Physique-Matière et Rayonnement Accéder directement au contenu
Poster De Conférence Année : 2023

Study of Pd/Y based multilayers with B4C barrier layers using high energy photoemission spectroscopy combined with x-ray standing waves

Résumé

We use hard x-ray photoemission spectroscopy (HAXPES) combined with x-ray standing waves to characterize a series of Pd/Y based periodic multilayers designed to work in the 7.5-11 nm range. The samples are prepared by magnetron sputtering. For different samples thin B4C barrier layers are inserted at different locations within the stack: at the Pd-on-B4C interfaces, at the B4C-on-Pd interfaces or at both interfaces. These barrier layers are expected to improve the reflecting performance of the multilayers [1,2]. The aimed period of the samples is 4 nm. The experiments consist in obtaining the core level photoemission spectra of the various elements for a series of grazing angles. The angular scan is made in the range given by the Bragg law, considering the multilayer period and the incident photon energy, in order to generate to strong standing wave in the stack. Owing to the period of the multilayer and the presence of a 2.5 nm-thick capping layer, the photon energy is chosen to be 10 keV in order to probe the first 5-6 periods of the stack. Thus the Bragg angle is a little less than 1°. Rotating the sample enables putting the nodes of the electric field at some particular location of the stack, thus to make the excitation depth-selective, coming from one interface or another or from the center of one given layer. The changes of the chemical shift of the Pd 2p and 3d, Y 2p and 3d, N 1s, C 1s and B 1s core level peaks as a function of the angle, that is to say as a function of the location in the stack will give information about the possible interfacial processes taking place in the multilayers.
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Dates et versions

hal-03931343 , version 1 (16-01-2023)

Identifiants

  • HAL Id : hal-03931343 , version 1

Citer

M.-Y Wu, V Ilakovac, J.-M André, K Le Guen, A Giglia, et al.. Study of Pd/Y based multilayers with B4C barrier layers using high energy photoemission spectroscopy combined with x-ray standing waves. Ecasia'17, 17th Eur. Conf. on Applications of Surface and Interface Analysis, Sep 2023, Montpellier, France. ⟨hal-03931343⟩
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