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Communication Dans Un Congrès Année : 2005

3D simulation using Modal Method by Fourier Expansion: application to EUV lithography and scatterometry

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hal-00023230 , version 1 (21-04-2006)

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  • HAL Id : hal-00023230 , version 1

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Patrick Schiavone, Rafik Smaali, David Fuard, Maxime Besacier. 3D simulation using Modal Method by Fourier Expansion: application to EUV lithography and scatterometry. Fraunhofer IISB Lithography Simulation Workshop, 2005, Pommersfelden, Germany. ⟨hal-00023230⟩

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