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Article Dans Une Revue Journal of Renewable and Sustainable Energy Année : 2017

Deposition of ZnO based thin films by atmospheric pressure spatial atomic layer deposition for application in solar cells

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Matériaux
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hal-01758842 , version 1 (04-04-2018)

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Viet Huong Nguyen, João Resende, Carmen Jiménez, Jean-Luc Deschanvres, Perrine Carroy, et al.. Deposition of ZnO based thin films by atmospheric pressure spatial atomic layer deposition for application in solar cells. Journal of Renewable and Sustainable Energy, 2017, 9 (2), pp.021203. ⟨10.1063/1.4979822⟩. ⟨hal-01758842⟩
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