Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors - CNRS - Centre national de la recherche scientifique
Proceedings/Recueil Des Communications Année : 2019

Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors

Résumé

Cavity optomechanics devices are leading edge candidates for a new generation of sensors both in the quantum and classical realms. Several single devices have been demonstrated in numerous labs, however large-scale integration capability necessary for industrial deployment is still an issue. In this paper, we present very-large-scale integrated (VLSI) optomechanical sensors fabricated from standard 200 mm Silicon-On-Insulator (SOI) wafers. Optical properties over a statistically significant sample size have been systematically investigated and show an excellent modeling to experiment agreement, a coupling parameter dispersion of 7% and a manufacturing yield larger than 98%. Controlled versatile sensors, such as these, could easily be embedded in any chip where mass or force sensing is needed.
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Dates et versions

hal-02365398 , version 1 (15-11-2019)

Identifiants

Citer

L. Schwab, P.E. Allain, L. Banniard, A. Fafin, M. Gély, et al.. Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors. 2018 IEEE International Electron Devices Meeting (IEDM), IEEE, pp.4.7.1-4.7.4, 2019, ⟨10.1109/IEDM.2018.8614508⟩. ⟨hal-02365398⟩
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