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Article Dans Une Revue Japanese Journal of Applied Physics Année : 2016

Characterization of zeolite-trench-embedded microcantilevers with CMOS strain gauge for integrated gas sensor applications

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Chimie
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hal-02410450 , version 1 (13-12-2019)

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Shu Inoue, Matthieu Denoual, Hussein Awala, Julien Grand, Sveltana Mintova, et al.. Characterization of zeolite-trench-embedded microcantilevers with CMOS strain gauge for integrated gas sensor applications. Japanese Journal of Applied Physics, 2016, 55 (4S), pp.04EF14. ⟨10.7567/JJAP.55.04EF14⟩. ⟨hal-02410450⟩
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