Scalable high-precision tuning of miniature photonic resonators by resonant cavity-enhanced photoelectrochemical etching - Archive ouverte HAL Access content directly
Journal Articles Nature Communications Year : 2017

Scalable high-precision tuning of miniature photonic resonators by resonant cavity-enhanced photoelectrochemical etching

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hal-03449022 , version 1 (25-11-2021)

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  • HAL Id : hal-03449022 , version 1

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Eduardo Gil-Santos, Christopher Baker, Aristide Lemaître, Sara Ducci, Carmen Gomez, et al.. Scalable high-precision tuning of miniature photonic resonators by resonant cavity-enhanced photoelectrochemical etching. Nature Communications, 2017. ⟨hal-03449022⟩
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