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https://cnrs.hal.science/hal-03971990
Submitted on : Friday, February 3, 2023-2:16:19 PM
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- HAL Id : hal-03971990 , version 1
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T. Barres, H. Montigaud, O. Stephan, Bernard Tribollet, Yann Cohin, et al.. Characterization of the nano-porosity of silicon thin layers : impedance modeling of nanopores. 68th ISE Annual Meeting, ISE, Aug 2017, Providence, United States. ⟨hal-03971990⟩
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