Characterization of the nano-porosity of silicon thin layers : impedance modeling of nanopores - Archive ouverte HAL Access content directly
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Characterization of the nano-porosity of silicon thin layers : impedance modeling of nanopores

T. Barres
  • Function : Author
H. Montigaud
O. Stephan
  • Function : Author
Yann Cohin
  • Function : Author
  • PersonId : 962295
M. Boinet
  • Function : Author
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Dates and versions

hal-03971990 , version 1 (03-02-2023)

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  • HAL Id : hal-03971990 , version 1

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T. Barres, H. Montigaud, O. Stephan, Bernard Tribollet, Yann Cohin, et al.. Characterization of the nano-porosity of silicon thin layers : impedance modeling of nanopores. 68th ISE Annual Meeting, ISE, Aug 2017, Providence, United States. ⟨hal-03971990⟩
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