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Communication Dans Un Congrès Année : 2023

Silicon Compatible Process To Integrate Impedance Cytometry With Mechanical Characterization

Résumé

This work is in the framework of SMMiL-E activities (a joint project of CNRS, Institute of Industrial Science, Centre Oscar Lambret, and the University of Lille). The authors acknowledge the French State-Region plan (CPER IRICL, Lille Interdisciplinary research Institute against cancer) for financial support and IRCL for hosting SMMiL-E. M.C. Tarhan and Q. Rezard acknowledge I-SITE ULNE.
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Dates et versions

hal-04048785 , version 1 (12-06-2023)

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Citer

Quentin Rezard, Faruk Azam Shaik, Jean Claude Gerbedoen, Fabrizio Cleri, Dominique Collard, et al.. Silicon Compatible Process To Integrate Impedance Cytometry With Mechanical Characterization. 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2023, Munich, Germany. pp.475-478, ⟨10.1109/MEMS49605.2023.10052621⟩. ⟨hal-04048785⟩
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