Investigation of a dielectric barrier discharge operating at atmospheric pressure for spatial atomic layer deposition application - CNRS - Centre national de la recherche scientifique
Conference Papers Year : 2023

Investigation of a dielectric barrier discharge operating at atmospheric pressure for spatial atomic layer deposition application

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Engineering Sciences [physics]

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https://cnrs.hal.science/hal-04264430

Submitted on : Monday, October 30, 2023-11:50:41 AM

Last modification on : Tuesday, June 4, 2024-11:28:03 AM

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hal-04264430 , version 1 (30-10-2023)

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  • HAL Id : hal-04264430 , version 1

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Gervais Ndiffo Yemeli, Tian Tian, Hervé Rabat, Olivier Aubry, David Munoz-Rojas, et al.. Investigation of a dielectric barrier discharge operating at atmospheric pressure for spatial atomic layer deposition application. INSPEDADM 2023, Oct 2023, La Rochelle, France. ⟨hal-04264430⟩

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