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Poster De Conférence Année : 2023

Plasma etching of nanopatterned GaN-based pillars for integrated μLEDs fabrication: application in μDisplays

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hal-04624781 , version 1 (25-06-2024)

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  • HAL Id : hal-04624781 , version 1

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N. Labchir, S. Hammami, K. Baril, M. Wehbe, S. Labau, et al.. Plasma etching of nanopatterned GaN-based pillars for integrated μLEDs fabrication: application in μDisplays. PLASMA ETCH AND STRIP MICROTECHNOLOGY (PESM 2023), Jun 2023, Grenoble, France. ⟨hal-04624781⟩
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