Deep Learning-Based on Feature Enhancement Module for Outer and Inner Object Segmentation in Semiconductor Images: Applications in Annotation and Metrology - CNRS - Centre national de la recherche scientifique
Communication Dans Un Congrès Année : 2025

Deep Learning-Based on Feature Enhancement Module for Outer and Inner Object Segmentation in Semiconductor Images: Applications in Annotation and Metrology

Résumé

The increasing demand for precise metrology and accurate annotations in semiconductor manufacturing, particularly in the analysis of Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM) images, requires advanced segmentation techniques. These images are critical for evaluating the physical and dimensional characteristics of devices at the nanoscale. However, the inherent low contrast and noise in SEM/TEM images present substantial challenges for traditional image segmentation methods, often leading to misinterpretation of object boundaries and diminished accuracy.
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Dates et versions

hal-04801909 , version 1 (25-11-2024)

Identifiants

  • HAL Id : hal-04801909 , version 1

Citer

Isaac Wilfried Sanou, Julien Baderot, Ali Hallal, Vincent Barra, Johann Foucher. Deep Learning-Based on Feature Enhancement Module for Outer and Inner Object Segmentation in Semiconductor Images: Applications in Annotation and Metrology. 17th International Conference on Quality Control by Artificial Vision (QCAV), Jun 2025, Yamanashi, Japan. ⟨hal-04801909⟩
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